ICL is mainly the 2nd floor of bldg 39, with some exceptions

---

Process	Lab	Tool	Process Category	Subcategory	Description	Color Code
+	ICL	4-pt-probe	Metrology	Electrical	Sheet resistance measurement of semiconductors	Red
+	ICL	5A-GateOx	Diffusion	Oxidation	Diffusion tube for gate oxide growth	Green
+	ICL	5B-Anneal	Diffusion	Bake	Annealing tube	Green
+	ICL	5C-FieldOx	Diffusion	Oxidation	Diffusion tube for wet oxide growth of thicker films	Green
+	ICL	5D-ThickOx	Diffusion	Oxidation	Diffusion tube for wet oxide growth of thicker films	Green
+	ICL	6A-nPoly	Diffusion	CVD	Polysilicon deposition tube for n-type poly Si	Green
+	ICL	6B-Poly	Diffusion	CVD	Polysilicon deposition tube for p-type poly Si	Green
+	ICL	6C-LTO	Diffusion	CVD	Low temperature CVD oxide deposition	Green
+	ICL	6D-Nitride	Diffusion	CVD	Deposition of stoichiometric silicon nitride	Green
+	ICL	AFM	Metrology	Profile	Atomic Force Microscope for Surface Analysis	Red &Green
+	ICL	ALD	Deposition	CVD	Atomic Layer Deposition	Red
+	ICL	ALD-Oxford	Deposition	CVD, PECVD	Atomic Layer Deposition	Green
+	ICL	AME5000	Etch	RIE	RIE etcher for frontend silicon processes	Green
+	ICL	asher-ICL	Photo	Clean	Single wafer oxygen plasma for photoresist removal	Green
+	ICL	pTrack	Photo	Coat	Automated coater and developer track	Green
+	ICL	concept1	Deposition	PECVD	PECVD deposition of oxides, nitrides, and TEOS	Green
+	ICL	cv	Metrology	Electrical	Electrical characterization of dielectrics	Green
+	ICL	DCVD	Deposition	PECVD	PECVD deposition of oxides, nitrides, and a-Si	Green
+	ICL	diesaw	Packaging	Physical	Wafer dicing saw	Red
+	ICL	diesaw-3240	Packaging	Physical	Wafer dicing saw	Red
+	ICL	eBeam-EVO	Deposition	Evaporate	Metal evaporator of CMOS compatible metals	Green
+	ICL	endura	Deposition	Sputter	Metal sputter deposition	Green
+	ICL	epi-Centura	Deposition	CVD	Not open to public	Green
+	ICL	GnP	Wet	Other	Chemical Mechanical Polishing to planarize surfaces	Red &Green
+	ICL	goldwire	Packaging	Physical	Gold ball bonder for device packaging	Red
+	ICL	i-stepper	Photo	Expose	i-line stepper	Red &Green
+	ICL	LAM490B	Etch	RIE	Chlorine based plasma etching of silicon	Green
+	ICL	LAM590-ICL	Etch	RIE	Fluorine based plasma etching of silicon oxide and nitrides	Green
+	ICL	nitrEtch-HotPhos	Wet	Acids	Hot phosphoric nitride etch bath	Green
+	ICL	oxEtch-BOE	Wet	Acids	Silicon dioxide etch bath	Green
+	ICL	Oxford-100_PECVD	Deposition, Etch	PECVD	Dual chamber PECVD and plasma etch tool	Red
+	ICL	Oxford-100_Etch	Deposition, Etch	RIE	Dual chamber PECVD and plasma etch tool	Red
+	ICL	P10	Metrology	Profile	Stylus profilerometer	Green
+	ICL	premetal-Piranha	Wet	Acids	Piranha resist removal and cleaning station	Green
+	ICL	rainbow	Etch	RIE	Chlorine based plasma etcher for metals	Green
+	ICL	rca-ICL	Diffusion	Clean	Wafer cleaning before diffusion tubes	Green
+	ICL	RTA2	Diffusion	Bake	Rapid Thermal Annealing	Green
+	ICL	RTA-pieces	Diffusion	Bake	Rapid Thermal Annealing	Red
+	ICL	RTP	Diffusion	Bake	Rapid Thermal Annealing	Green
+	ICL	RTP-Si	Diffusion	Bake	Rapid Thermal Annealing	Green
+	ICL	semZeiss	Metrology	SEM	Scanning Electron Microscope	Red &Green
+	ICL	SM-300	Metrology	Thickness	Thickness measurement for CMP processing	Red &Green
+	ICL	TMAH-KOHhood	Wet	Acids	Silicon bulk wet etching	Red &Green
+	ICL	UV1280	Metrology	Thickness	Thin film characterization	Green
+	ICL	VTR	Diffusion	CVD	Low stress silicon nitride deposition	Green
+	ICL	wykoICL	Metrology	Profile	Optical profiling system	Green