Deposition of conformal thin films on substrate

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Process	Lab	Tool	Process Category	Subcategory	Description	Color Code
+	EML	ALD-EML	Deposition	CVD	Atomic Layer Deposition	EML
+	ICL	6A-nPoly	Diffusion	CVD	Polysilicon deposition tube for n-type poly Si	Green
+	ICL	6B-Poly	Diffusion	CVD	Polysilicon deposition tube for p-type poly Si	Green
+	ICL	6C-LTO	Diffusion	CVD	Low temperature CVD oxide deposition	Green
+	ICL	6D-Nitride	Diffusion	CVD	Deposition of stoichiometric silicon nitride	Green
+	ICL	ALD	Deposition	CVD	Atomic Layer Deposition	Red
+	ICL	ALD-Oxford	Deposition	CVD, PECVD	Atomic Layer Deposition	Green
+	ICL	epi-Centura	Deposition	CVD	Not open to public	Green
+	ICL	VTR	Diffusion	CVD	Low stress silicon nitride deposition	Green
+	TRL	B4-Poly	Diffusion	CVD	LPCVD polysilicon for Green wafers	Green
+	TRL	parylene	Deposition	CVD	Parylene depopsition	Red