The metrology tools help you understand what you actually did! Key categories are thin film measurement (e.g. Filmetrics-TRL or in EML filmetrics), optical and stylus profiling of surface topology (e.g. WYKO, [dektak], or AFM), and electrical measurements (e.g. IV-probe or parametric-tester). Microscopes, SEMs and specialized measurement equipment (e.g. FLX) round off the toolset.

Some tools can measure similar properties (e.g. thin film thickness in the UV1280, Filmetrics-TRL or nanospec), but different physical principles of operation might make one tool a better choice over the other (e.g. when measuring extremely thin dielectric films, the Filmetrics-TRL while a very easy tool to use, may not be the best choice).

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Process	Lab	Tool	Subcategory	Description	Color Code
+	EML	dektak-EML	Profile	Surface Profilerometer	EML
+	EML	filmetrics	Thickness	Thin Film Optical Measurement	EML
+	EML	parametric-tester	Electrical	Probe station for electrical measurements	EML
+	EML	semNeo	SEM	Very Basic Electron Microscope	EML
+	ICL	4-pt-probe	Electrical	Sheet resistance measurement of semiconductors	Red
+	ICL	AFM	Profile	Atomic Force Microscope for Surface Analysis	Red &Green
+	ICL	cv	Electrical	Electrical characterization of dielectrics	Green
+	ICL	P10	Profile	Stylus profilerometer	Green
+	ICL	semZeiss	SEM	Scanning Electron Microscope	Red &Green
+	ICL	SM-300	Thickness	Thickness measurement for CMP processing	Red &Green
+	ICL	UV1280	Thickness	Thin film characterization	Green
+	ICL	wykoICL	Profile	Optical profiling system	Green
+	TRL	dek-NoAu	Profile	Stylus Profilerometer	Green
+	TRL	dektak-XT	Profile	Stylus Profilerometer	Red
+	TRL	ellipsometer-TRL	Thickness	Thin film thickness measurement	Red &Green
+	TRL	Filmetrics-TRL	Thickness	Thin film thickness measurement	Red &Green
+	TRL	FLX	Profile	Thin film stress measurement	Red &Green
+	TRL	Hall-probe	Electrical	Carrier measurement	Red
+	TRL	IV-probe	Electrical	Probe station with curve tracer for IV measurement	Red
+	TRL	nanospec	Thickness	Thin film thickness measurement	Red &Green
+	TRL	WYKO	Profile	Optical profiling system	Red &Green