Equipment
Lab and Coral Name | EML / parametric-tester |
Model | Hewlett-Packard |
Specialist | Kurt Broderick (Timothy Turner, Gary Riggott) |
Physical Location | TBD |
Classification
Process Category | Metrology |
Subcategory | Electrical |
Material Keywords | CMOS Metals, Non-CMOS Metals |
Sample Size | 6" Wafers, 4" Wafers, Pieces |
Alternative | ? |
Keywords | single wafer, manual load, manual operation, alignment |
Description
The parametric-tester is a parametric-tester that measures device characteristics
Best for | |
Limitations | |
Characteristics/FOM | |
Caution with | |
Machine Charges | 2/hour |
Documents
Process Matrix Details
PTC Matrix does not apply for EML
Ever been in EMLSamples from EML are never permitted to return to ICL or TRL