Anything that is not a 150mm or 100mm wafer. Pieces can be any shape or size. Smaller than 3 mm or irregular shaped pieces are more challenging to process (e.g. when coating). See the spinning substrate keyword.

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Process	Lab	Tool	Keywords	0	Description	Color Code
+	EBL	Elionix	ERRORERROR	Electron beam lithography system	Red &Green
+	EML	acid-hood-EML	ERRORERROR	General Purpose Acid Fume-Hood	EML
+	EML	ALD-EML	ERRORERROR	Atomic Layer Deposition	EML
+	EML	anneal-furnace	ERRORERROR	Anneal Furnace	EML
+	EML	asher-EML	ERRORERROR	Oxygen Plasma	EML
+	EML	BalzerSputterer	ERRORERROR	Thin sputter coating of samples	EML
+	EML	Box-Furnace	ERRORERROR	Anneal Furnace	EML
+	EML	coater-EML	ERRORERROR	Photoresist Coater	EML
+	EML	dektak-EML	ERRORERROR	Surface Profilerometer	EML
+	EML	eBeam-AJA	ERRORERROR	Metal and dielectric evaporator	EML
+	EML	filmetrics	ERRORERROR	Thin Film Optical Measurement	EML
+	EML	hotpress	ERRORERROR	Pressing for thermoplastic films	EML
+	EML	MA-4	ERRORERROR	Contact Lithography Mask Aligner	EML
+	EML	OxidationTube	ERRORERROR	Oxidation Furnace	EML
+	EML	parametric-tester	ERRORERROR	Probe station for electrical measurements	EML
+	EML	photo-hood-EML	ERRORERROR	Solvent Fume hood for lithography	EML
+	EML	plasmatherm	ERRORERROR	Plasma Etch and Deposition	EML
+	EML	RTA-EML	ERRORERROR	Rapid Thermal Annealing	EML
+	EML	semNeo	ERRORERROR	Very Basic Electron Microscope	EML
+	EML	SolventHood-EML	ERRORERROR	Solvent Fume hood for lithography	EML
+	EML	SputtererAJA	ERRORERROR	Sputter deposition tool	EML
+	EML	vac-oven	ERRORERROR	Temperature controlled vacuum oven	EML
+	TRL	2Dtransfer-platingHood	ERRORERROR	Electroplating wet bench and fume hood	Red
+	ICL	AFM	ERRORERROR	Atomic Force Microscope for Surface Analysis	Red &Green
+	ICL	ALD	ERRORERROR	Atomic Layer Deposition	Red
+	ICL	ALD-Oxford	ERRORERROR	Atomic Layer Deposition	Green
+	ICL	diesaw	ERRORERROR	Wafer dicing saw	Red
+	ICL	diesaw-3240	ERRORERROR	Wafer dicing saw	Red
+	ICL	eBeam-EVO	ERRORERROR	Metal evaporator of CMOS compatible metals	Green
+	ICL	goldwire	ERRORERROR	Gold ball bonder for device packaging	Red
+	ICL	Oxford-100_PECVD	ERRORERROR	Dual chamber PECVD and plasma etch tool	Red
+	ICL	Oxford-100_Etch	ERRORERROR	Dual chamber PECVD and plasma etch tool	Red
+	ICL	semZeiss	ERRORERROR	Scanning Electron Microscope	Red &Green
+	ICL	TMAH-KOHhood	ERRORERROR	Silicon bulk wet etching	Red &Green
+	ICL	wykoICL	ERRORERROR	Optical profiling system	Green
+	TRL	acid-hood	ERRORERROR	Acid processing station	Red &Green
+	TRL	AJA-TRL	ERRORERROR	Sputter deposition tool	Red
+	TRL	asher-TRL	ERRORERROR	Barrel asher for resist removal	Red &Green
+	TRL	Balzer-Elionix	ERRORERROR	SEM or EBL sample preparation	Red
+	TRL	CCNT	ERRORERROR	Carbon nanotube growth	Red
+	TRL	coater	ERRORERROR	Manual spin-coater for photoresists	Red &Green
+	TRL	dek-NoAu	ERRORERROR	Stylus Profilerometer	Green
+	TRL	dektak-XT	ERRORERROR	Stylus Profilerometer	Red
+	TRL	eBeamAu	ERRORERROR	Metal evaporator	Red
+	TRL	eBeamFP	ERRORERROR	Fast pumping metal evaporator	Red
+	TRL	ellipsometer-TRL	ERRORERROR	Thin film thickness measurement	Red &Green
+	TRL	EV1	ERRORERROR	Contact mask aligner	Red &Green
+	TRL	EV501	ERRORERROR	Bonder system to apply heat, vacuum and pressure	Red &Green
+	TRL	EV620	ERRORERROR	Aligner for bonding	Red &Green
+	TRL	EV-LC	ERRORERROR	Contact mask aligner	Red &Green
+	TRL	Filmetrics-TRL	ERRORERROR	Thin film thickness measurement	Red &Green
+	TRL	Greenflo	ERRORERROR	Acid processing station	Red &Green
+	TRL	Hall-probe	ERRORERROR	Carrier measurement	Red
+	TRL	Heidelberg	ERRORERROR	Laser direct-write exposure for wafers and masks	Red &Green
+	TRL	HMDS-TRL	ERRORERROR	HMDS oven	Red &Green
+	TRL	hotplate1	ERRORERROR	Hotplate for lithography	Red &Green
+	TRL	hotplate2	ERRORERROR	Hotplate for lithography	Red &Green
+	TRL	hotplate300	ERRORERROR	Hotplate for lithography	Red &Green
+	TRL	IV-probe	ERRORERROR	Probe station with curve tracer for IV measurement	Red
+	TRL	MA-6	ERRORERROR	Contact mask aligner	Red &Green
+	TRL	MLA-150	ERRORERROR	Direct-write lithography for wafers and larger pieces	Red &Green
+	TRL	nanospec	ERRORERROR	Thin film thickness measurement	Red &Green
+	TRL	OAI-Flood	ERRORERROR	Flood exposure for image reversal resists	Red &Green
+	TRL	parylene	ERRORERROR	Parylene depopsition	Red
+	TRL	photo-wet-Au	ERRORERROR	Solvent fume hood with sonicator	Red &Green
+	TRL	photo-wet-l	ERRORERROR	Wetbench for photoresist development	Red &Green
+	TRL	photo-wet-r	ERRORERROR	Wetbench for photoresist development	Red &Green
+	TRL	plasmaquest	ERRORERROR	Fluorine and Chlorine general purpose plasma deposition and etch tool	Red
+	TRL	PMMAspinner	ERRORERROR	Manual coater for PMMA and other photoresists	Red &Green
+	TRL	postbake	ERRORERROR	Bake oven 120C	Red &Green
+	TRL	prebakeovn	ERRORERROR	Bake oven 90C	Red &Green
+	TRL	PZTcoater	ERRORERROR	Coater to apply PZT films	Red
+	TRL	PZTfurnace	ERRORERROR	Bake oven for PZT coated wafers	Red
+	TRL	Resonetics	ERRORERROR	Laser ablation system	Red
+	TRL	RTA-HiT	ERRORERROR	Rapid Thermal Annealing	Red
+	TRL	SAMCO	ERRORERROR	Chlorine based plasma etcher for III-V materials	Red
+	TRL	SolventHood-TRL	ERRORERROR	Solvent fume hood	Red &Green
+	TRL	sts-CVD	ERRORERROR	PECVD deposition of oxides, nitrides, a-Si, SiC, and P-doped a-Si	Red
+	TRL	SU8spinner	ERRORERROR	Manual spin-coater for SU8 resists	Purple
+	TRL	TBM-8	ERRORERROR	Front-to-back alignement measurement	Red &Green
+	TRL	UVozone-Au	ERRORERROR	Cleans residual organics	Red
+	TRL	varTemp	ERRORERROR	Bake oven for variable temperature	Red
+	TRL	WYKO	ERRORERROR	Optical profiling system	Red &Green
+	TRL	XeF2	ERRORERROR	XeF2 isotropic etching of silicon	Red
+	LEAP	AutoBonder	ERRORERROR	Automated wirebonder	Red
+	LEAP	BallBonder	ERRORERROR	Manual ball bonder	Red
+	LEAP	WedgeBonder	ERRORERROR	Manual wedge bonder	Red
+	LEAP	X-rayInspection	ERRORERROR	X-Ray imaging	Red
+	LEAP	DieBonder	ERRORERROR	Automated pick and place	Red
+	LEAP	PlasmaCleaner	ERRORERROR	Plasma parts cleaning	Red
+	LEAP	ReflowOven	ERRORERROR	Reflow oven	Red
+	LEAP	QuickVisionMicroscope	ERRORERROR	Automated imaging microscope	Red