TRL is mainly the 4th floor of bldg 39, with some exceptions

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Process	Lab	Tool	Process Category	Subcategory	Description	Color Code
+	TRL	2Dtransfer-platingHood	Wet	Acids	Electroplating wet bench and fume hood	Red
+	TRL	A1-GateOx	Diffusion	Oxidation	Thermal Oxidation for Green Silicon Wafers	Green
+	TRL	A2-WetOxBond	Diffusion	Oxidation	Thermal Oxidation and other thermal process for GREEN Si wafers	Green
+	TRL	A3-Sinter	Diffusion	Bake	Sintering for GREEN Si wafers	Green
+	TRL	A4-III-Vanneal	Diffusion	Bake	Annealing for GREEN III-V samples	Red
+	TRL	acid-hood	Wet	Acids	Acid processing station	Red &Green
+	TRL	AJA-TRL	Deposition	Sputter	Sputter deposition tool	Red
+	TRL	asherMatrix-TRL	Photo	Clean	Single wafer oxygen plasma for photoresist removal	Red
+	TRL	asher-TRL	Photo	Clean	Barrel asher for resist removal	Red &Green
+	TRL	B1-Au	Diffusion	Oxidation	Gold compatible anneal tube	Red
+	TRL	B2-Ox-alloy-Poly	Diffusion	Oxidation	Thermal Oxidation and LPCVD Polysilicon for RED wafers	Green
+	TRL	B3-DryOx	Diffusion	Oxidation	Thermal Oxidation	Green
+	TRL	B4-Poly	Diffusion	CVD	LPCVD polysilicon for Green wafers	Green
+	TRL	Balzer-Elionix	Deposition	Sputter	SEM or EBL sample preparation	Red
+	TRL	CCNT	Deposition	PECVD	Carbon nanotube growth	Red
+	TRL	coater	Photo	Coat	Manual spin-coater for photoresists	Red &Green
+	TRL	dek-NoAu	Metrology	Profile	Stylus Profilerometer	Green
+	TRL	dektak-XT	Metrology	Profile	Stylus Profilerometer	Red
+	TRL	develop-Brewer	Photo	Coat	Resist develop and postbake	Red &Green
+	TRL	eBeamAu	Deposition	Evaporate	Metal evaporator	Red
+	TRL	eBeamFP	Deposition	Evaporate	Fast pumping metal evaporator	Red
+	TRL	ellipsometer-TRL	Metrology	Thickness	Thin film thickness measurement	Red &Green
+	TRL	EV1	Photo	Expose	Contact mask aligner	Red &Green
+	TRL	EV501	Photo	Bond	Bonder system to apply heat, vacuum and pressure	Red &Green
+	TRL	EV620	Photo	Bond	Aligner for bonding	Red &Green
+	TRL	EV-LC	Photo	Expose	Contact mask aligner	Red &Green
+	TRL	Filmetrics-TRL	Metrology	Thickness	Thin film thickness measurement	Red &Green
+	TRL	FLX	Metrology	Profile	Thin film stress measurement	Red &Green
+	TRL	Greenflo	Wet	Acids	Acid processing station	Red &Green
+	TRL	Hall-probe	Metrology	Electrical	Carrier measurement	Red
+	TRL	Heidelberg	Photo	Expose	Laser direct-write exposure for wafers and masks	Red &Green
+	TRL	HMDS-TRL	Photo	Bake	HMDS oven	Red &Green
+	TRL	hotplate1	Photo	Bake	Hotplate for lithography	Red &Green
+	TRL	hotplate2	Photo	Bake	Hotplate for lithography	Red &Green
+	TRL	hotplate300	Photo	Bake	Hotplate for lithography	Red &Green
+	TRL	IV-probe	Metrology	Electrical	Probe station with curve tracer for IV measurement	Red
+	TRL	LAM590-TRL	Etch	RIE	Fluorine based plasma etching of oxide and nitrides	Red
+	TRL	MA-6	Photo	Expose	Contact mask aligner	Red &Green
+	TRL	MLA-150	Photo	Expose	Direct-write lithography for wafers and larger pieces	Red &Green
+	TRL	nanospec	Metrology	Thickness	Thin film thickness measurement	Red &Green
+	TRL	OAI-Flood	Photo	Expose	Flood exposure for image reversal resists	Red &Green
+	TRL	parylene	Deposition	CVD	Parylene depopsition	Red
+	TRL	photo-wet-Au	Wet	Solvents	Solvent fume hood with sonicator	Red &Green
+	TRL	photo-wet-l	Wet	Solvents	Wetbench for photoresist development	Red &Green
+	TRL	photo-wet-r	Wet	Solvents	Wetbench for photoresist development	Red &Green
+	TRL	plasmaquest	Etch	RIE	Fluorine and Chlorine general purpose plasma deposition and etch tool	Red
+	TRL	PMMAspinner	Photo	Coat	Manual coater for PMMA and other photoresists	Red &Green
+	TRL	postbake	Photo	Bake	Bake oven 120C	Red &Green
+	TRL	prebakeovn	Photo	Bake	Bake oven 90C	Red &Green
+	TRL	PZTcoater	Deposition	Spin-Coat	Coater to apply PZT films	Red
+	TRL	PZTfurnace	Deposition	Bake	Bake oven for PZT coated wafers	Red
+	TRL	rca-TRL	Diffusion	Clean	Wafer cleaning before diffusion tubes	Green
+	TRL	Resonetics	Photo	Expose	Laser ablation system	Red
+	TRL	RTA-HiT	Diffusion	Bake	Rapid Thermal Annealing	Red
+	TRL	SAMCO	Etch	RIE	Chlorine based plasma etcher for III-V materials	Red
+	TRL	SolventHood-TRL	Wet	Solvents	Solvent fume hood	Red &Green
+	TRL	sts1	Etch	DRIE	Deep reactive ion etcher for silicon	Red
+	TRL	sts2	Etch	DRIE	Deep reactive ion etcher for silicon	Green
+	TRL	sts-CVD	Deposition	PECVD	PECVD deposition of oxides, nitrides, a-Si, SiC, and P-doped a-Si	Red
+	TRL	sts-Pegasus	Etch	DRIE	Deep reactive ion etcher for silicon	Red
+	TRL	SU8oven	Photo	Bake	Oven to dry foil from SU8 coater	Purple
+	TRL	SU8spinner	Photo	Coat	Manual spin-coater for SU8 resists	Purple
+	TRL	TBM-8	Photo	Bond	Front-to-back alignement measurement	Red &Green
+	TRL	UVozone-Au	Etch	Clean	Cleans residual organics	Red
+	TRL	varTemp	Photo	Bake	Bake oven for variable temperature	Red
+	TRL	WYKO	Metrology	Profile	Optical profiling system	Red &Green
+	TRL	XeF2	Etch	RIE	XeF2 isotropic etching of silicon	Red