Etches and wafer cleans

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Process	Lab	Tool	Process Category	Subcategory	Description	Color Code
+	TRL	2Dtransfer-platingHood	Wet	Acids	Electroplating wet bench and fume hood	Red
+	ICL	nitrEtch-HotPhos	Wet	Acids	Hot phosphoric nitride etch bath	Green
+	ICL	oxEtch-BOE	Wet	Acids	Silicon dioxide etch bath	Green
+	ICL	premetal-Piranha	Wet	Acids	Piranha resist removal and cleaning station	Green
+	ICL	TMAH-KOHhood	Wet	Acids	Silicon bulk wet etching	Red &Green
+	TRL	acid-hood	Wet	Acids	Acid processing station	Red &Green
+	TRL	Greenflo	Wet	Acids	Acid processing station	Red &Green