The furnaces in TRL and ICL can be used for high temperature annealing, diffusion, oxidation, and LPCVD. Because of the high temperatures involved, tubes are separated by samples cleanliness level (RED vs GREEN), and most of the time require an RCA clean to make sure no contamination enters the tube.

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Process	Lab	Tool	Subcategory	Description	Color Code
+	EML	anneal-furnace	Bake	Anneal Furnace	EML
+	EML	Box-Furnace	Bake	Anneal Furnace	EML
+	EML	OxidationTube	Oxidation	Oxidation Furnace	EML
+	EML	RTA-EML	Bake	Rapid Thermal Annealing	EML
+	EML	vac-oven	Bake	Temperature controlled vacuum oven	EML
+	ICL	5A-GateOx	Oxidation	Diffusion tube for gate oxide growth	Green
+	ICL	5B-Anneal	Bake	Annealing tube	Green
+	ICL	5C-FieldOx	Oxidation	Diffusion tube for wet oxide growth of thicker films	Green
+	ICL	5D-ThickOx	Oxidation	Diffusion tube for wet oxide growth of thicker films	Green
+	ICL	6A-nPoly	CVD	Polysilicon deposition tube for n-type poly Si	Green
+	ICL	6B-Poly	CVD	Polysilicon deposition tube for p-type poly Si	Green
+	ICL	6C-LTO	CVD	Low temperature CVD oxide deposition	Green
+	ICL	6D-Nitride	CVD	Deposition of stoichiometric silicon nitride	Green
+	ICL	rca-ICL	Clean	Wafer cleaning before diffusion tubes	Green
+	ICL	RTA2	Bake	Rapid Thermal Annealing	Green
+	ICL	RTA-pieces	Bake	Rapid Thermal Annealing	Red
+	ICL	RTP	Bake	Rapid Thermal Annealing	Green
+	ICL	RTP-Si	Bake	Rapid Thermal Annealing	Green
+	ICL	VTR	CVD	Low stress silicon nitride deposition	Green
+	TRL	A1-GateOx	Oxidation	Thermal Oxidation for Green Silicon Wafers	Green
+	TRL	A2-WetOxBond	Oxidation	Thermal Oxidation and other thermal process for GREEN Si wafers	Green
+	TRL	A3-Sinter	Bake	Sintering for GREEN Si wafers	Green
+	TRL	A4-III-Vanneal	Bake	Annealing for GREEN III-V samples	Red
+	TRL	B1-Au	Oxidation	Gold compatible anneal tube	Red
+	TRL	B2-Ox-alloy-Poly	Oxidation	Thermal Oxidation and LPCVD Polysilicon for RED wafers	Green
+	TRL	B3-DryOx	Oxidation	Thermal Oxidation	Green
+	TRL	B4-Poly	CVD	LPCVD polysilicon for Green wafers	Green
+	TRL	rca-TRL	Clean	Wafer cleaning before diffusion tubes	Green
+	TRL	RTA-HiT	Bake	Rapid Thermal Annealing	Red