Equipment
| Lab and Coral Name | EML / OxidationTube |
| Model | Lindberg |
| Specialist | Kurt Broderick (Timothy Turner, Gary Riggott) |
| Physical Location | 5F 1-North |
Classification
| Process Category | Diffusion |
| Subcategory | Oxidation |
| Material Keywords | Silicon, SiO2, Dielectrics, Non-Standard Materials |
| Sample Size | 4" Wafers, Pieces |
| Alternative | EML / anneal-furnace |
| Keywords | multi wafer, manual load, multiple pieces, top side of sample, vacuum, temperature, manual operation |
Description
The OxidationTube is a tube furnace that allows for wet and dry oxidation, anneals, bakes. Separate tubes are available for samples with and without metals. The tubes are small and can only accommodate 4" wafers or smaller samples. Steam is provided by a heated water bath.
| Best for | |
| Limitations | |
| Characteristics/FOM | Gases: N2, O2, Steam |
| Caution with | |
| Machine Charges | 8/hour |
Documents
Process Matrix Details
PTC Matrix does not apply for EML
Ever been in EMLSamples from EML are never permitted to return to ICL or TRL