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Photo Deposition Etch Diffusion Wet Metrology Packaging Procedures

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Silicon or polysilicon

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Process	Lab	Tool	Process Category	Subcategory	Description	Color Code
+	EML	acid-hood-EML	Wet	Solvents	General Purpose Acid Fume-Hood	EML
+	EML	OxidationTube	Diffusion	Oxidation	Oxidation Furnace	EML
+	EML	plasmatherm	Deposition, Etch	PECVD, RIE	Plasma Etch and Deposition	EML
+	ICL	6A-nPoly	Diffusion	CVD	Polysilicon deposition tube for n-type poly Si	Green
+	ICL	6B-Poly	Diffusion	CVD	Polysilicon deposition tube for p-type poly Si	Green
+	ICL	AME5000	Etch	RIE	RIE etcher for frontend silicon processes	Green
+	ICL	DCVD	Deposition	PECVD	PECVD deposition of oxides, nitrides, and a-Si	Green
+	ICL	diesaw	Packaging	Physical	Wafer dicing saw	Red
+	ICL	diesaw-3240	Packaging	Physical	Wafer dicing saw	Red
+	ICL	epi-Centura	Deposition	CVD	Not open to public	Green
+	ICL	GnP	Wet	Other	Chemical Mechanical Polishing to planarize surfaces	Red &Green
+	ICL	LAM490B	Etch	RIE	Chlorine based plasma etching of silicon	Green
+	ICL	rca-ICL	Diffusion	Clean	Wafer cleaning before diffusion tubes	Green
+	ICL	RTA2	Diffusion	Bake	Rapid Thermal Annealing	Green
+	ICL	RTA-pieces	Diffusion	Bake	Rapid Thermal Annealing	Red
+	ICL	RTP	Diffusion	Bake	Rapid Thermal Annealing	Green
+	ICL	RTP-Si	Diffusion	Bake	Rapid Thermal Annealing	Green
+	ICL	SM-300	Metrology	Thickness	Thickness measurement for CMP processing	Red &Green
+	ICL	TMAH-KOHhood	Wet	Acids	Silicon bulk wet etching	Red &Green
	MTL	Procedures-Cleaning	Procedures	Clean	Sample Cleaning	Red &Green
	MTL	Procedures-Etching	Procedures	Etch	Etching of materials	Red &Green
	MTL	Procedures-Metrology	Procedures	Metrology	Test and Measurement	Red &Green
+	TRL	acid-hood	Wet	Acids	Acid processing station	Red &Green
+	TRL	B2-Ox-alloy-Poly	Diffusion	Oxidation	Thermal Oxidation and LPCVD Polysilicon for RED wafers	Green
+	TRL	B4-Poly	Diffusion	CVD	LPCVD polysilicon for Green wafers	Green
+	TRL	develop-Brewer	Photo	Coat	Resist develop and postbake	Red &Green
+	TRL	EV501	Photo	Bond	Bonder system to apply heat, vacuum and pressure	Red &Green
+	TRL	EV620	Photo	Bond	Aligner for bonding	Red &Green
+	TRL	Greenflo	Wet	Acids	Acid processing station	Red &Green
+	TRL	HMDS-TRL	Photo	Bake	HMDS oven	Red &Green
+	TRL	plasmaquest	Etch	RIE	Fluorine and Chlorine general purpose plasma deposition and etch tool	Red
+	TRL	Resonetics	Photo	Expose	Laser ablation system	Red
+	TRL	RTA-HiT	Diffusion	Bake	Rapid Thermal Annealing	Red
+	TRL	sts1	Etch	DRIE	Deep reactive ion etcher for silicon	Red
+	TRL	sts2	Etch	DRIE	Deep reactive ion etcher for silicon	Green
+	TRL	sts-CVD	Deposition	PECVD	PECVD deposition of oxides, nitrides, a-Si, SiC, and P-doped a-Si	Red
+	TRL	sts-Pegasus	Etch	DRIE	Deep reactive ion etcher for silicon	Red
+	TRL	XeF2	Etch	RIE	XeF2 isotropic etching of silicon	Red