Spreads a uniform coat of liquid, usually photoresist, on a flat substrate

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Process	Lab	Tool	Process Category	Subcategory	Description	Color Code
+	EML	coater-EML	Photo	Coat	Photoresist Coater	EML
+	ICL	pTrack	Photo	Coat	Automated coater and developer track	Green
+	TRL	coater	Photo	Coat	Manual spin-coater for photoresists	Red &Green
+	TRL	develop-Brewer	Photo	Coat	Resist develop and postbake	Red &Green
+	TRL	PMMAspinner	Photo	Coat	Manual coater for PMMA and other photoresists	Red &Green
+	TRL	SU8spinner	Photo	Coat	Manual spin-coater for SU8 resists	Purple