EML is mainly the 5th floor of bldg 39

---

Process	Lab	Tool	Process Category	Subcategory	Description	Color Code
+	EML	acid-hood-EML	Wet	Solvents	General Purpose Acid Fume-Hood	EML
+	EML	ALD-EML	Deposition	CVD	Atomic Layer Deposition	EML
+	EML	anneal-furnace	Diffusion	Bake	Anneal Furnace	EML
+	EML	asher-EML	Photo	Clean	Oxygen Plasma	EML
+	EML	BalzerSputterer	Deposition	Sputter	Thin sputter coating of samples	EML
+	EML	Box-Furnace	Diffusion	Bake	Anneal Furnace	EML
+	EML	coater-EML	Photo	Coat	Photoresist Coater	EML
+	EML	dektak-EML	Metrology	Profile	Surface Profilerometer	EML
+	EML	eBeam-AJA	Deposition	Evaporate	Metal and dielectric evaporator	EML
+	EML	filmetrics	Metrology	Thickness	Thin Film Optical Measurement	EML
+	EML	hotpress	Photo	Bond	Pressing for thermoplastic films	EML
+	EML	MA-4	Photo	Expose	Contact Lithography Mask Aligner	EML
+	EML	OxidationTube	Diffusion	Oxidation	Oxidation Furnace	EML
+	EML	parametric-tester	Metrology	Electrical	Probe station for electrical measurements	EML
+	EML	photo-hood-EML	Wet	Solvents	Solvent Fume hood for lithography	EML
+	EML	plasmatherm	Deposition, Etch	PECVD, RIE	Plasma Etch and Deposition	EML
+	EML	RTA-EML	Diffusion	Bake	Rapid Thermal Annealing	EML
+	EML	semNeo	Metrology	SEM	Very Basic Electron Microscope	EML
+	EML	SolventHood-EML	Wet	Solvents	Solvent Fume hood for lithography	EML
+	EML	SputtererAJA	Deposition	Sputter	Sputter deposition tool	EML
+	EML	vac-oven	Diffusion	Bake	Temperature controlled vacuum oven	EML