Equipment
Lab and Coral NameEML / hotpress
ModelCarver 4386
SpecialistKurt Broderick    (Timothy Turner, Gary Riggott)
Physical Location5F 3-South Packaging
Classification
Process CategoryPhoto
SubcategoryBond
Material KeywordsOther Polymers
Sample SizePieces
Alternative?
Keywordssingle wafer, manual load, both sides of sample, temperature, manual operation, alignment
Description
The hotpress is a hydraulic press that applies loads ~100 kN, electrically heats to ~340 C; used on thermoplastic films (eg, PMMA)

Best for
Limitations
Characteristics/FOM
Caution with
Machine Charges8/hour
Documents

SOP
Resist RecipesBaseline resist recipes for TRL

External Links
GuideMicroChem Application Notes
Process Matrix Details


PTC Matrix does not apply for EML
Ever been in EMLSamples from EML are never permitted to return to ICL or TRL