The tool is operated manually, and the usuer needs to be in attendance for most of the key steps (e.g. pressing buttons or making decisions). With these tools, you can't go off to take a nap.

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Process	Lab	Tool	Process Category	Subcategory	Description	Color Code
+	EBL	Elionix	Photo	Expose	Electron beam lithography system	Red &Green
+	EML	acid-hood-EML	Wet	Solvents	General Purpose Acid Fume-Hood	EML
+	EML	ALD-EML	Deposition	CVD	Atomic Layer Deposition	EML
+	EML	anneal-furnace	Diffusion	Bake	Anneal Furnace	EML
+	EML	asher-EML	Photo	Clean	Oxygen Plasma	EML
+	EML	BalzerSputterer	Deposition	Sputter	Thin sputter coating of samples	EML
+	EML	Box-Furnace	Diffusion	Bake	Anneal Furnace	EML
+	EML	coater-EML	Photo	Coat	Photoresist Coater	EML
+	EML	dektak-EML	Metrology	Profile	Surface Profilerometer	EML
+	EML	eBeam-AJA	Deposition	Evaporate	Metal and dielectric evaporator	EML
+	EML	filmetrics	Metrology	Thickness	Thin Film Optical Measurement	EML
+	EML	hotpress	Photo	Bond	Pressing for thermoplastic films	EML
+	EML	MA-4	Photo	Expose	Contact Lithography Mask Aligner	EML
+	EML	OxidationTube	Diffusion	Oxidation	Oxidation Furnace	EML
+	EML	parametric-tester	Metrology	Electrical	Probe station for electrical measurements	EML
+	EML	photo-hood-EML	Wet	Solvents	Solvent Fume hood for lithography	EML
+	EML	RTA-EML	Diffusion	Bake	Rapid Thermal Annealing	EML
+	EML	semNeo	Metrology	SEM	Very Basic Electron Microscope	EML
+	EML	SolventHood-EML	Wet	Solvents	Solvent Fume hood for lithography	EML
+	EML	SputtererAJA	Deposition	Sputter	Sputter deposition tool	EML
+	EML	vac-oven	Diffusion	Bake	Temperature controlled vacuum oven	EML
+	TRL	2Dtransfer-platingHood	Wet	Acids	Electroplating wet bench and fume hood	Red
+	ICL	4-pt-probe	Metrology	Electrical	Sheet resistance measurement of semiconductors	Red
+	ICL	5A-GateOx	Diffusion	Oxidation	Diffusion tube for gate oxide growth	Green
+	ICL	5B-Anneal	Diffusion	Bake	Annealing tube	Green
+	ICL	5C-FieldOx	Diffusion	Oxidation	Diffusion tube for wet oxide growth of thicker films	Green
+	ICL	5D-ThickOx	Diffusion	Oxidation	Diffusion tube for wet oxide growth of thicker films	Green
+	ICL	6A-nPoly	Diffusion	CVD	Polysilicon deposition tube for n-type poly Si	Green
+	ICL	6B-Poly	Diffusion	CVD	Polysilicon deposition tube for p-type poly Si	Green
+	ICL	6C-LTO	Diffusion	CVD	Low temperature CVD oxide deposition	Green
+	ICL	6D-Nitride	Diffusion	CVD	Deposition of stoichiometric silicon nitride	Green
+	ICL	AFM	Metrology	Profile	Atomic Force Microscope for Surface Analysis	Red &Green
+	ICL	ALD	Deposition	CVD	Atomic Layer Deposition	Red
+	ICL	cv	Metrology	Electrical	Electrical characterization of dielectrics	Green
+	ICL	diesaw	Packaging	Physical	Wafer dicing saw	Red
+	ICL	diesaw-3240	Packaging	Physical	Wafer dicing saw	Red
+	ICL	eBeam-EVO	Deposition	Evaporate	Metal evaporator of CMOS compatible metals	Green
+	ICL	GnP	Wet	Other	Chemical Mechanical Polishing to planarize surfaces	Red &Green
+	ICL	goldwire	Packaging	Physical	Gold ball bonder for device packaging	Red
+	ICL	nitrEtch-HotPhos	Wet	Acids	Hot phosphoric nitride etch bath	Green
+	ICL	oxEtch-BOE	Wet	Acids	Silicon dioxide etch bath	Green
+	ICL	P10	Metrology	Profile	Stylus profilerometer	Green
+	ICL	premetal-Piranha	Wet	Acids	Piranha resist removal and cleaning station	Green
+	ICL	rca-ICL	Diffusion	Clean	Wafer cleaning before diffusion tubes	Green
+	ICL	semZeiss	Metrology	SEM	Scanning Electron Microscope	Red &Green
+	ICL	SM-300	Metrology	Thickness	Thickness measurement for CMP processing	Red &Green
+	ICL	TMAH-KOHhood	Wet	Acids	Silicon bulk wet etching	Red &Green
+	ICL	wykoICL	Metrology	Profile	Optical profiling system	Green
+	TRL	A1-GateOx	Diffusion	Oxidation	Thermal Oxidation for Green Silicon Wafers	Green
+	TRL	A2-WetOxBond	Diffusion	Oxidation	Thermal Oxidation and other thermal process for GREEN Si wafers	Green
+	TRL	A3-Sinter	Diffusion	Bake	Sintering for GREEN Si wafers	Green
+	TRL	A4-III-Vanneal	Diffusion	Bake	Annealing for GREEN III-V samples	Red
+	TRL	acid-hood	Wet	Acids	Acid processing station	Red &Green
+	TRL	AJA-TRL	Deposition	Sputter	Sputter deposition tool	Red
+	TRL	asher-TRL	Photo	Clean	Barrel asher for resist removal	Red &Green
+	TRL	B1-Au	Diffusion	Oxidation	Gold compatible anneal tube	Red
+	TRL	B2-Ox-alloy-Poly	Diffusion	Oxidation	Thermal Oxidation and LPCVD Polysilicon for RED wafers	Green
+	TRL	B3-DryOx	Diffusion	Oxidation	Thermal Oxidation	Green
+	TRL	B4-Poly	Diffusion	CVD	LPCVD polysilicon for Green wafers	Green
+	TRL	Balzer-Elionix	Deposition	Sputter	SEM or EBL sample preparation	Red
+	TRL	CCNT	Deposition	PECVD	Carbon nanotube growth	Red
+	TRL	coater	Photo	Coat	Manual spin-coater for photoresists	Red &Green
+	TRL	dek-NoAu	Metrology	Profile	Stylus Profilerometer	Green
+	TRL	dektak-XT	Metrology	Profile	Stylus Profilerometer	Red
+	TRL	eBeamAu	Deposition	Evaporate	Metal evaporator	Red
+	TRL	ellipsometer-TRL	Metrology	Thickness	Thin film thickness measurement	Red &Green
+	TRL	EV1	Photo	Expose	Contact mask aligner	Red &Green
+	TRL	EV501	Photo	Bond	Bonder system to apply heat, vacuum and pressure	Red &Green
+	TRL	EV620	Photo	Bond	Aligner for bonding	Red &Green
+	TRL	EV-LC	Photo	Expose	Contact mask aligner	Red &Green
+	TRL	Filmetrics-TRL	Metrology	Thickness	Thin film thickness measurement	Red &Green
+	TRL	FLX	Metrology	Profile	Thin film stress measurement	Red &Green
+	TRL	Greenflo	Wet	Acids	Acid processing station	Red &Green
+	TRL	Hall-probe	Metrology	Electrical	Carrier measurement	Red
+	TRL	Heidelberg	Photo	Expose	Laser direct-write exposure for wafers and masks	Red &Green
+	TRL	hotplate1	Photo	Bake	Hotplate for lithography	Red &Green
+	TRL	hotplate2	Photo	Bake	Hotplate for lithography	Red &Green
+	TRL	hotplate300	Photo	Bake	Hotplate for lithography	Red &Green
+	TRL	IV-probe	Metrology	Electrical	Probe station with curve tracer for IV measurement	Red
+	TRL	MA-6	Photo	Expose	Contact mask aligner	Red &Green
+	TRL	MLA-150	Photo	Expose	Direct-write lithography for wafers and larger pieces	Red &Green
+	TRL	nanospec	Metrology	Thickness	Thin film thickness measurement	Red &Green
+	TRL	OAI-Flood	Photo	Expose	Flood exposure for image reversal resists	Red &Green
+	TRL	parylene	Deposition	CVD	Parylene depopsition	Red
+	TRL	photo-wet-Au	Wet	Solvents	Solvent fume hood with sonicator	Red &Green
+	TRL	photo-wet-l	Wet	Solvents	Wetbench for photoresist development	Red &Green
+	TRL	photo-wet-r	Wet	Solvents	Wetbench for photoresist development	Red &Green
+	TRL	plasmaquest	Etch	RIE	Fluorine and Chlorine general purpose plasma deposition and etch tool	Red
+	TRL	PMMAspinner	Photo	Coat	Manual coater for PMMA and other photoresists	Red &Green
+	TRL	PZTcoater	Deposition	Spin-Coat	Coater to apply PZT films	Red
+	TRL	PZTfurnace	Deposition	Bake	Bake oven for PZT coated wafers	Red
+	TRL	rca-TRL	Diffusion	Clean	Wafer cleaning before diffusion tubes	Green
+	TRL	Resonetics	Photo	Expose	Laser ablation system	Red
+	TRL	SolventHood-TRL	Wet	Solvents	Solvent fume hood	Red &Green
+	TRL	sts1	Etch	DRIE	Deep reactive ion etcher for silicon	Red
+	TRL	SU8spinner	Photo	Coat	Manual spin-coater for SU8 resists	Purple
+	TRL	TBM-8	Photo	Bond	Front-to-back alignement measurement	Red &Green
+	TRL	UVozone-Au	Etch	Clean	Cleans residual organics	Red
+	TRL	varTemp	Photo	Bake	Bake oven for variable temperature	Red
+	TRL	WYKO	Metrology	Profile	Optical profiling system	Red &Green
+	TRL	XeF2	Etch	RIE	XeF2 isotropic etching of silicon	Red
+	LEAP	BallBonder	Packaging	Physical	Manual ball bonder	Red
+	LEAP	WedgeBonder	Packaging	Physical	Manual wedge bonder	Red
+	LEAP	X-rayInspection	Packaging	Physical	X-Ray imaging	Red
+	LEAP	PlasmaCleaner	Packaging	Clean	Plasma parts cleaning	Red
+	LEAP	ReflowOven	Packaging	Bake	Reflow oven	Red