Deposition of directional thin films, often metal. Used for lift-off.

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Process	Lab	Tool	Process Category	Subcategory	Description	Color Code
+	EML	eBeam-AJA	Deposition	Evaporate	Metal and dielectric evaporator	EML
+	ICL	eBeam-EVO	Deposition	Evaporate	Metal evaporator of CMOS compatible metals	Green
+	TRL	eBeamAu	Deposition	Evaporate	Metal evaporator	Red
+	TRL	eBeamFP	Deposition	Evaporate	Fast pumping metal evaporator	Red