| Acids
| needs work
| 2Dtransfer-platingHood,nitrEtch-HotPhos,oxEtch-BOE,premetal-Piranha,TMAH-KOHhood,acid-hood,Greenflo,
|
| Bake
| needs work
| anneal-furnace,Box-Furnace,RTA-EML,vac-oven,5B-Anneal,RTA2,RTA-pieces,RTP,RTP-Si,A3-Sinter,A4-III-Vanneal,HMDS-TRL,hotplate1,hotplate2,hotplate300,postbake,prebakeovn,PZTfurnace,RTA-HiT,SU8oven,varTemp,ReflowOven,
|
| Bond
| needs work
| hotpress,EV501,EV620,TBM-8,
|
| Clean
| needs work
| asher-EML,asher-ICL,rca-ICL,Procedures-Cleaning,asherMatrix-TRL,asher-TRL,rca-TRL,UVozone-Au,PlasmaCleaner,
|
| Coat
| needs work
| coater-EML,pTrack,coater,develop-Brewer,PMMAspinner,SU8spinner,
|
| CVD
| needs work
| ALD-EML,6A-nPoly,6B-Poly,6C-LTO,6D-Nitride,ALD,ALD-Oxford,epi-Centura,VTR,B4-Poly,parylene,
|
| Deposit
| needs work
| Procedures-Deposition,
|
| DRIE
| needs work
| sts1,sts2,sts-Pegasus,
|
| Electrical
| 0
| parametric-tester,4-pt-probe,cv,Hall-probe,IV-probe,
|
| Etch
| needs work
| Procedures-Etching,
|
| Evaporate
| needs work
| eBeam-AJA,eBeam-EVO,eBeamAu,eBeamFP,
|
| Expose
| needs work
| Elionix,MA-4,i-stepper,EV1,EV-LC,Heidelberg,MA-6,MLA-150,OAI-Flood,Resonetics,
|
| General
| needs work
| Procedures-General,OutsideLab,CNS,NSL,SNL,
|
| Metrology
| needs work
| Procedures-Metrology,
|
| Other
| needs work
| GnP,
|
| Oxidation
| needs work
| OxidationTube,5A-GateOx,5C-FieldOx,5D-ThickOx,A1-GateOx,A2-WetOxBond,B1-Au,B2-Ox-alloy-Poly,B3-DryOx,
|
| PECVD
| needs work
| plasmatherm,ALD-Oxford,concept1,DCVD,Oxford-100_PECVD,CCNT,sts-CVD,
|
| Photo
| needs work
| Procedures-Lithography,
|
| Physical
| 0
| diesaw,diesaw-3240,goldwire,AutoBonder,BallBonder,WedgeBonder,X-rayInspection,DieBonder,QuickVisionMicroscope,
|
| Profile
| needs work
| dektak-EML,AFM,P10,wykoICL,dek-NoAu,dektak-XT,FLX,WYKO,
|
| RIE
| needs work
| plasmatherm,AME5000,LAM490B,LAM590-ICL,Oxford-100_Etch,rainbow,LAM590-TRL,plasmaquest,SAMCO,XeF2,
|
| SEM
| 0
| semNeo,semZeiss,
|
| Solvents
| needs work
| acid-hood-EML,photo-hood-EML,SolventHood-EML,photo-wet-Au,photo-wet-l,photo-wet-r,SolventHood-TRL,
|
| Spin-Coat
| needs work
| PZTcoater,
|
| Sputter
| needs work
| BalzerSputterer,SputtererAJA,endura,AJA-TRL,Balzer-Elionix,
|
| TBD
| needs work
|
|
| Thickness
| needs work
| filmetrics,SM-300,UV1280,ellipsometer-TRL,Filmetrics-TRL,nanospec,
|