The subcategories relate to the physical mode of operation or purpose for a tool. For example, if you are interested in
tools that can bake a sample, you will find both furnaces and hotplates. But, it remains your responsibility to evaluate
which of these tools is suitable, and in which tool your sample is permitted (e.g. you cannot bake your photoresist in the furnace)
| Attribute | Description | Tool List |
| Acids
| needs work
| 2Dtransfer-platingHood,nitrEtch-HotPhos,oxEtch-BOE,premetal-Piranha,TMAH-KOHhood,acid-hood,Greenflo,
|
| Bake
| needs work
| anneal-furnace,Box-Furnace,RTA-EML,vac-oven,5B-Anneal,RTA2,RTA-pieces,RTP,RTP-Si,A3-Sinter,A4-III-Vanneal,HMDS-TRL,hotplate1,hotplate2,hotplate300,postbake,prebakeovn,PZTfurnace,RTA-HiT,SU8oven,varTemp,ReflowOven,
|
| Bond
| needs work
| hotpress,EV501,EV620,TBM-8,
|
| Clean
| needs work
| asher-EML,asher-ICL,rca-ICL,Procedures-Cleaning,asherMatrix-TRL,asher-TRL,rca-TRL,UVozone-Au,PlasmaCleaner,
|
| Coat
| needs work
| coater-EML,pTrack,coater,develop-Brewer,PMMAspinner,SU8spinner,
|
| CVD
| needs work
| ALD-EML,6A-nPoly,6B-Poly,6C-LTO,6D-Nitride,ALD,ALD-Oxford,epi-Centura,VTR,B4-Poly,parylene,
|
| Deposit
| needs work
| Procedures-Deposition,
|
| DRIE
| needs work
| sts1,sts2,sts-Pegasus,
|
| Electrical
| 0
| parametric-tester,4-pt-probe,cv,Hall-probe,IV-probe,
|
| Etch
| needs work
| Procedures-Etching,
|
| Evaporate
| needs work
| eBeam-AJA,eBeam-EVO,eBeamAu,eBeamFP,
|
| Expose
| needs work
| Elionix,MA-4,i-stepper,EV1,EV-LC,Heidelberg,MA-6,MLA-150,OAI-Flood,Resonetics,
|
| General
| needs work
| Procedures-General,OutsideLab,CNS,NSL,SNL,
|
| Metrology
| needs work
| Procedures-Metrology,
|
| Other
| needs work
| GnP,
|
| Oxidation
| needs work
| OxidationTube,5A-GateOx,5C-FieldOx,5D-ThickOx,A1-GateOx,A2-WetOxBond,B1-Au,B2-Ox-alloy-Poly,B3-DryOx,
|
| PECVD
| needs work
| plasmatherm,ALD-Oxford,concept1,DCVD,Oxford-100_PECVD,CCNT,sts-CVD,
|
| Photo
| needs work
| Procedures-Lithography,
|
| Physical
| 0
| diesaw,diesaw-3240,goldwire,AutoBonder,BallBonder,WedgeBonder,X-rayInspection,DieBonder,QuickVisionMicroscope,
|
| Profile
| needs work
| dektak-EML,AFM,P10,wykoICL,dek-NoAu,dektak-XT,FLX,WYKO,
|
| RIE
| needs work
| plasmatherm,AME5000,LAM490B,LAM590-ICL,Oxford-100_Etch,rainbow,LAM590-TRL,plasmaquest,SAMCO,XeF2,
|
| SEM
| 0
| semNeo,semZeiss,
|
| Solvents
| needs work
| acid-hood-EML,photo-hood-EML,SolventHood-EML,photo-wet-Au,photo-wet-l,photo-wet-r,SolventHood-TRL,
|
| Spin-Coat
| needs work
| PZTcoater,
|
| Sputter
| needs work
| BalzerSputterer,SputtererAJA,endura,AJA-TRL,Balzer-Elionix,
|
| TBD
| needs work
|
|
| Thickness
| needs work
| filmetrics,SM-300,UV1280,ellipsometer-TRL,Filmetrics-TRL,nanospec,
|