Equipment
| Lab and Coral Name | EML / dektak-EML |
| Model | Sloan Dektak II |
| Specialist | Kurt Broderick (Timothy Turner, Gary Riggott) |
| Physical Location | 5F Hallway |
Classification
| Process Category | Metrology |
| Subcategory | Profile |
| Material Keywords | None |
| Sample Size | 6" Wafers, 4" Wafers, Pieces |
| Alternative | ? |
| Keywords | single wafer, manual load, top side of sample, manual operation, alignment |
Description
The dektak-EML is a stylus profilometer that measures surface roughness and feature profiles. Don't measure soft materials (underbaked photoresist for example) that can ruin the tip.
| Best for | Measuring step heights & surface roughness of experimental materials |
| Limitations | Actual tip profile is rather flat so large step heights and very small features (exact limitations TBD) result in inaccurate profile measurements. Not connected to the internet so need flashdrive to export data. Occasionally has virus because of all the flashdrives. |
| Characteristics/FOM | |
| Caution with | Large step heights measure by stepping down, not stepping up. Also be careful not to move the sample manually when the tip is in contact with sample. |
| Machine Charges | 2/hour |
Documents
SOP
| Dektak | SOP for the Dektak profiler |
Process Matrix Details
PTC Matrix does not apply for EML
Ever been in EMLSamples from EML are never permitted to return to ICL or TRL