Machines by Process Category: Procedures
| Process | Lab | Tool | Subcategory | Description | |
|---|---|---|---|---|---|
| MTL | Procedures-Cleaning | Clean | Sample Cleaning | ||
| MTL | Procedures-Deposition | Deposit | Deposition of thin films | ||
| MTL | Procedures-Etching | Etch | Etching of materials | ||
| MTL | Procedures-General | General | Broader concepts | ||
| MTL | Procedures-Lithography | Photo | Lithography | ||
| MTL | Procedures-Metrology | Metrology | Test and Measurement | ||
| Other | OutsideLab | General | Tools used in outside facilities | ||
| Other | CNS | General | Tools used in Harvard CNS | ||
| Other | NSL | General | Tools used in NSL bldg 39 | ||
| Other | SNL | General | Tools used in SNL bldg 37 |