Removes residue and contaminants, can involve acids, solvents, or plasma

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Process	Lab	Tool	Process Category	Subcategory	Description	Color Code
+	EML	asher-EML	Photo	Clean	Oxygen Plasma	EML
+	ICL	asher-ICL	Photo	Clean	Single wafer oxygen plasma for photoresist removal	Green
+	ICL	rca-ICL	Diffusion	Clean	Wafer cleaning before diffusion tubes	Green
	MTL	Procedures-Cleaning	Procedures	Clean	Sample Cleaning	Red &Green
+	TRL	asherMatrix-TRL	Photo	Clean	Single wafer oxygen plasma for photoresist removal	Red
+	TRL	asher-TRL	Photo	Clean	Barrel asher for resist removal	Red &Green
+	TRL	rca-TRL	Diffusion	Clean	Wafer cleaning before diffusion tubes	Green
+	TRL	UVozone-Au	Etch	Clean	Cleans residual organics	Red
+	LEAP	PlasmaCleaner	Packaging	Clean	Plasma parts cleaning	Red