Equipment
| Lab and Coral Name | EML / vac-oven |
| Model | 0 |
| Specialist | Kurt Broderick (Timothy Turner, Gary Riggott) |
| Physical Location | TBD |
Classification
| Process Category | Diffusion |
| Subcategory | Bake |
| Material Keywords | None |
| Sample Size | 6" Wafers, 4" Wafers, Pieces |
| Alternative | ? |
| Keywords | manual load, temperature, manual operation |
Description
| Best for | |
| Limitations | |
| Characteristics/FOM | |
| Caution with | |
| Machine Charges | 8/hour |
Documents
Process Matrix Details
PTC Matrix does not apply for EML
Ever been in EMLSamples from EML are never permitted to return to ICL or TRL