Machines by Location: TBD
Process | Lab | Tool | Process Category | Subcategory | Description | |
---|---|---|---|---|---|---|
EML | acid-hood-EML | Wet | Solvents | General Purpose Acid Fume-Hood | ||
EML | ALD-EML | Deposition | CVD | Atomic Layer Deposition | ||
EML | anneal-furnace | Diffusion | Bake | Anneal Furnace | ||
EML | BalzerSputterer | Deposition | Sputter | Thin sputter coating of samples | ||
EML | Box-Furnace | Diffusion | Bake | Anneal Furnace | ||
EML | eBeam-AJA | Deposition | Evaporate | Metal and dielectric evaporator | ||
EML | filmetrics | Metrology | Thickness | Thin Film Optical Measurement | ||
EML | MA-4 | Photo | Expose | Contact Lithography Mask Aligner | ||
EML | parametric-tester | Metrology | Electrical | Probe station for electrical measurements | ||
EML | RTA-EML | Diffusion | Bake | Rapid Thermal Annealing | ||
EML | vac-oven | Diffusion | Bake | Temperature controlled vacuum oven | ||
ICL | SM-300 | Metrology | Thickness | Thickness measurement for CMP processing | ||
TRL | Hall-probe | Metrology | Electrical | Carrier measurement | ||
TRL | Resonetics | Photo | Expose | Laser ablation system |