Machines by Location: TBD
| Process | Lab | Tool | Process Category | Subcategory | Description | |
|---|---|---|---|---|---|---|
| EML | acid-hood-EML | Wet | Solvents | General Purpose Acid Fume-Hood | ||
| EML | ALD-EML | Deposition | CVD | Atomic Layer Deposition | ||
| EML | anneal-furnace | Diffusion | Bake | Anneal Furnace | ||
| EML | BalzerSputterer | Deposition | Sputter | Thin sputter coating of samples | ||
| EML | Box-Furnace | Diffusion | Bake | Anneal Furnace | ||
| EML | eBeam-AJA | Deposition | Evaporate | Metal and dielectric evaporator | ||
| EML | filmetrics | Metrology | Thickness | Thin Film Optical Measurement | ||
| EML | MA-4 | Photo | Expose | Contact Lithography Mask Aligner | ||
| EML | parametric-tester | Metrology | Electrical | Probe station for electrical measurements | ||
| EML | RTA-EML | Diffusion | Bake | Rapid Thermal Annealing | ||
| EML | vac-oven | Diffusion | Bake | Temperature controlled vacuum oven | ||
| ICL | SM-300 | Metrology | Thickness | Thickness measurement for CMP processing | ||
| TRL | Hall-probe | Metrology | Electrical | Carrier measurement | ||
| TRL | Resonetics | Photo | Expose | Laser ablation system |