24-041
| Bldg 24, Rm 041
| Elionix,
|
2F 1-Hallway Etch
| 2nd Floor, 1-Hallway
| rainbow,
|
2F 1-North Deposition
| 2nd Floor, 1-North
| ALD,concept1,endura,
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2F 1-NorthExtension Deposition
| 2nd Floor, 1-North
| Oxford-100_PECVD,Oxford-100_Etch,
|
2F 1-South Metrology
| 2nd Floor, 1-South
| 4-pt-probe,ALD-Oxford,cv,P10,UV1280,wykoICL,
|
2F 2-North Etch
| 2nd Floor, 2-North
| AFM,LAM490B,LAM590-ICL,
|
2F 2-NorthExtension
| 2nd Floor, 1-North
|
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2F 2-South DepAndEtch
| 2nd Floor, 2-South
| AME5000,eBeam-EVO,premetal-Piranha,
|
2F 3-North Photo
| 2nd Floor, 3-North
| i-stepper,semZeiss,
|
2F 3-South Photo
| 2nd Floor, 3-South
| asher-ICL,pTrack,nitrEtch-HotPhos,oxEtch-BOE,
|
2F 4-North Diffusion
| 2nd Floor, 4-North
| 5A-GateOx,5B-Anneal,5C-FieldOx,5D-ThickOx,6A-nPoly,6B-Poly,6C-LTO,6D-Nitride,VTR,
|
2F 4-South Diffusion
| 2nd Floor, 4-South
| DCVD,rca-ICL,RTA2,RTA-pieces,RTP,RTP-Si,
|
39-528
| 5th Floor, Room 528
| epi-Centura,
|
4F Bonding
| 4th Floor, Bonding
| EV501,EV620,nanospec,TBM-8,
|
4F Deposition
| 4th Floor, Deposition Room
| AJA-TRL,eBeamAu,
|
4F Entry Diffusion
| 4th Floor, Entry
| A1-GateOx,A2-WetOxBond,A3-Sinter,A4-III-Vanneal,B1-Au,B2-Ox-alloy-Poly,B3-DryOx,B4-Poly,sts-CVD,
|
4F External-Deposition
| 4th Floor, External Deposition
| CCNT,eBeamFP,
|
4F External-Photo
| 4th Floor, External Photo
| Balzer-Elionix,Heidelberg,PMMAspinner,
|
4F Hallway
| 4th Floor, Hallway
| Greenflo,
|
4F Main-North
| 4th Floor, Main North
| asher-TRL,dek-NoAu,ellipsometer-TRL,Filmetrics-TRL,FLX,IV-probe,LAM590-TRL,parylene,photo-wet-Au,photo-wet-l,photo-wet-r,plasmaquest,SAMCO,WYKO,
|
4F Main-South
| 4th Floor, Main South
| acid-hood,asherMatrix-TRL,rca-TRL,RTA-HiT,sts1,sts2,sts-Pegasus,XeF2,
|
4F Photo-North
| 4th Floor, Photo North
| coater,develop-Brewer,EV1,EV-LC,HMDS-TRL,MA-6,OAI-Flood,postbake,prebakeovn,SolventHood-TRL,
|
4F Photo-South
| 4th Floor, Photo South
| dektak-XT,hotplate1,hotplate2,hotplate300,MLA-150,PZTcoater,PZTfurnace,SU8oven,SU8spinner,UVozone-Au,varTemp,
|
5F 1-North
| 5th Floor, 1-North
| OxidationTube,
|
5F 1-South Photo
| 5th Floor, 1-South
| coater-EML,photo-hood-EML,SolventHood-EML,
|
5F 2-North
| 5th Floor, 2-North
| asher-EML,SputtererAJA,TMAH-KOHhood,
|
5F 2-South Photo
| 5th Floor, 1-South
|
|
5F 3-South Packaging
| 5th Floor, 3-South
| hotpress,plasmatherm,2Dtransfer-platingHood,diesaw,diesaw-3240,GnP,goldwire,
|
5F 4-South Photo
| 5th Floor, 1-South
|
|
5F Hallway
| 5th Floor, Hallway
| dektak-EML,semNeo,
|
TBD
| Needs a room assignment
| acid-hood-EML,ALD-EML,anneal-furnace,BalzerSputterer,Box-Furnace,eBeam-AJA,filmetrics,MA-4,parametric-tester,RTA-EML,vac-oven,SM-300,Hall-probe,Resonetics,
|
Web
| MTL Website
| Procedures-Cleaning,Procedures-Deposition,Procedures-Etching,Procedures-General,Procedures-Lithography,Procedures-Metrology,OutsideLab,CNS,NSL,SNL,
|
35-011
| LEAP Packaging
| AutoBonder,BallBonder,WedgeBonder,X-rayInspection,DieBonder,PlasmaCleaner,ReflowOven,QuickVisionMicroscope,
|