This page shows the location of tools in MTL. For tools in building 39, you can also go to the floor plan below to navigate the tools and locations.
Please note that historicall, the three labs (ICL,TRL,EML) were in each located on a specific floor in building 39 (ICL=2nd, TRL=4th, EML=5th).
However, over the years this geographic separation is not exactly true anymore. Thus, you may find some ICL tools on the 5th floor in the EML space,
or TRL tools on the 2nd floor in ICL. Please note that there is a very strict separation between samples processed in EML vs (TRL/ICL) tools, even
for equipment that shares the same physical location.
We also included a more general map of the campus, with additional shared facilities that users often seek out - primarily for post-process analysis. Note that
many of these are not cleanroom facilities, and therefore samples at outside labs are generally not permitted back into TRL or ICL (but are into EML).
| Attribute | Description | Tool List |
| 24-041
| Bldg 24, Rm 041
| Elionix,
|
| 2F 1-Hallway Etch
| 2nd Floor, 1-Hallway
| rainbow,
|
| 2F 1-North Deposition
| 2nd Floor, 1-North
| ALD,concept1,endura,
|
| 2F 1-NorthExtension Deposition
| 2nd Floor, 1-North
| Oxford-100_PECVD,Oxford-100_Etch,
|
| 2F 1-South Metrology
| 2nd Floor, 1-South
| 4-pt-probe,ALD-Oxford,cv,P10,UV1280,wykoICL,
|
| 2F 2-North Etch
| 2nd Floor, 2-North
| AFM,LAM490B,LAM590-ICL,
|
| 2F 2-NorthExtension
| 2nd Floor, 1-North
|
|
| 2F 2-South DepAndEtch
| 2nd Floor, 2-South
| AME5000,eBeam-EVO,premetal-Piranha,
|
| 2F 3-North Photo
| 2nd Floor, 3-North
| i-stepper,semZeiss,
|
| 2F 3-South Photo
| 2nd Floor, 3-South
| asher-ICL,pTrack,nitrEtch-HotPhos,oxEtch-BOE,
|
| 2F 4-North Diffusion
| 2nd Floor, 4-North
| 5A-GateOx,5B-Anneal,5C-FieldOx,5D-ThickOx,6A-nPoly,6B-Poly,6C-LTO,6D-Nitride,VTR,
|
| 2F 4-South Diffusion
| 2nd Floor, 4-South
| DCVD,rca-ICL,RTA2,RTA-pieces,RTP,RTP-Si,
|
| 39-528
| 5th Floor, Room 528
| epi-Centura,
|
| 4F Bonding
| 4th Floor, Bonding
| EV501,EV620,nanospec,TBM-8,
|
| 4F Deposition
| 4th Floor, Deposition Room
| AJA-TRL,eBeamAu,
|
| 4F Entry Diffusion
| 4th Floor, Entry
| A1-GateOx,A2-WetOxBond,A3-Sinter,A4-III-Vanneal,B1-Au,B2-Ox-alloy-Poly,B3-DryOx,B4-Poly,sts-CVD,
|
| 4F External-Deposition
| 4th Floor, External Deposition
| CCNT,eBeamFP,
|
| 4F External-Photo
| 4th Floor, External Photo
| Balzer-Elionix,Heidelberg,PMMAspinner,
|
| 4F Hallway
| 4th Floor, Hallway
| Greenflo,
|
| 4F Main-North
| 4th Floor, Main North
| asher-TRL,dek-NoAu,ellipsometer-TRL,Filmetrics-TRL,FLX,IV-probe,LAM590-TRL,parylene,photo-wet-Au,photo-wet-l,photo-wet-r,plasmaquest,SAMCO,WYKO,
|
| 4F Main-South
| 4th Floor, Main South
| acid-hood,asherMatrix-TRL,rca-TRL,RTA-HiT,sts1,sts2,sts-Pegasus,XeF2,
|
| 4F Photo-North
| 4th Floor, Photo North
| coater,develop-Brewer,EV1,EV-LC,HMDS-TRL,MA-6,OAI-Flood,postbake,prebakeovn,SolventHood-TRL,
|
| 4F Photo-South
| 4th Floor, Photo South
| dektak-XT,hotplate1,hotplate2,hotplate300,MLA-150,PZTcoater,PZTfurnace,SU8oven,SU8spinner,UVozone-Au,varTemp,
|
| 5F 1-North
| 5th Floor, 1-North
| OxidationTube,
|
| 5F 1-South Photo
| 5th Floor, 1-South
| coater-EML,photo-hood-EML,SolventHood-EML,
|
| 5F 2-North
| 5th Floor, 2-North
| asher-EML,SputtererAJA,TMAH-KOHhood,
|
| 5F 2-South Photo
| 5th Floor, 1-South
|
|
| 5F 3-South Packaging
| 5th Floor, 3-South
| hotpress,plasmatherm,2Dtransfer-platingHood,diesaw,diesaw-3240,GnP,goldwire,
|
| 5F 4-South Photo
| 5th Floor, 1-South
|
|
| 5F Hallway
| 5th Floor, Hallway
| dektak-EML,semNeo,
|
| TBD
| Needs a room assignment
| acid-hood-EML,ALD-EML,anneal-furnace,BalzerSputterer,Box-Furnace,eBeam-AJA,filmetrics,MA-4,parametric-tester,RTA-EML,vac-oven,SM-300,Hall-probe,Resonetics,
|
| Web
| MTL Website
| Procedures-Cleaning,Procedures-Deposition,Procedures-Etching,Procedures-General,Procedures-Lithography,Procedures-Metrology,OutsideLab,CNS,NSL,SNL,
|
| 35-011
| LEAP Packaging
| AutoBonder,BallBonder,WedgeBonder,X-rayInspection,DieBonder,PlasmaCleaner,ReflowOven,QuickVisionMicroscope,
|
