This room is the 1st equipment bay inside the ICL cleanroom, on the north facing side (left side after entering). The official MIT room number is 39-295. The nearest phone is x3-0978 located in the hallway between bay 1 and 2.

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Process	Lab	Tool	Process Category	Subcategory	Description	Color Code
+	ICL	ALD	Deposition	CVD	Atomic Layer Deposition	Red
+	ICL	concept1	Deposition	PECVD	PECVD deposition of oxides, nitrides, and TEOS	Green
+	ICL	endura	Deposition	Sputter	Metal sputter deposition	Green