This room is on the 4th floor of building 39, inside the TRL cleanroom area. This is at the end of the TRL cleanroom, in the "etch area", towards the windows. The official MIT room number is 39-487. The nearest phone is x3-0030 located at the north-west corner by the plasmaquest.

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Process	Lab	Tool	Process Category	Subcategory	Description	Color Code
+	TRL	acid-hood	Wet	Acids	Acid processing station	Red &Green
+	TRL	asherMatrix-TRL	Photo	Clean	Single wafer oxygen plasma for photoresist removal	Red
+	TRL	rca-TRL	Diffusion	Clean	Wafer cleaning before diffusion tubes	Green
+	TRL	RTA-HiT	Diffusion	Bake	Rapid Thermal Annealing	Red
+	TRL	sts1	Etch	DRIE	Deep reactive ion etcher for silicon	Red
+	TRL	sts2	Etch	DRIE	Deep reactive ion etcher for silicon	Green
+	TRL	sts-Pegasus	Etch	DRIE	Deep reactive ion etcher for silicon	Red
+	TRL	XeF2	Etch	RIE	XeF2 isotropic etching of silicon	Red