Deep silicon etch, straight sidewalls and high aspect ratios possible

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Process	Lab	Tool	Process Category	Subcategory	Description	Color Code
+	TRL	sts1	Etch	DRIE	Deep reactive ion etcher for silicon	Red
+	TRL	sts2	Etch	DRIE	Deep reactive ion etcher for silicon	Green
+	TRL	sts-Pegasus	Etch	DRIE	Deep reactive ion etcher for silicon	Red