Hardens photoresist

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Process	Lab	Tool	Process Category	Subcategory	Description	Color Code
+	EML	anneal-furnace	Diffusion	Bake	Anneal Furnace	EML
+	EML	Box-Furnace	Diffusion	Bake	Anneal Furnace	EML
+	EML	RTA-EML	Diffusion	Bake	Rapid Thermal Annealing	EML
+	EML	vac-oven	Diffusion	Bake	Temperature controlled vacuum oven	EML
+	ICL	5B-Anneal	Diffusion	Bake	Annealing tube	Green
+	ICL	RTA2	Diffusion	Bake	Rapid Thermal Annealing	Green
+	ICL	RTA-pieces	Diffusion	Bake	Rapid Thermal Annealing	Red
+	ICL	RTP	Diffusion	Bake	Rapid Thermal Annealing	Green
+	ICL	RTP-Si	Diffusion	Bake	Rapid Thermal Annealing	Green
+	TRL	A3-Sinter	Diffusion	Bake	Sintering for GREEN Si wafers	Green
+	TRL	A4-III-Vanneal	Diffusion	Bake	Annealing for GREEN III-V samples	Red
+	TRL	HMDS-TRL	Photo	Bake	HMDS oven	Red &Green
+	TRL	hotplate1	Photo	Bake	Hotplate for lithography	Red &Green
+	TRL	hotplate2	Photo	Bake	Hotplate for lithography	Red &Green
+	TRL	hotplate300	Photo	Bake	Hotplate for lithography	Red &Green
+	TRL	postbake	Photo	Bake	Bake oven 120C	Red &Green
+	TRL	prebakeovn	Photo	Bake	Bake oven 90C	Red &Green
+	TRL	PZTfurnace	Deposition	Bake	Bake oven for PZT coated wafers	Red
+	TRL	RTA-HiT	Diffusion	Bake	Rapid Thermal Annealing	Red
+	TRL	SU8oven	Photo	Bake	Oven to dry foil from SU8 coater	Purple
+	TRL	varTemp	Photo	Bake	Bake oven for variable temperature	Red
+	LEAP	ReflowOven	Packaging	Bake	Reflow oven	Red