This room is the 2nd room inside the EML cleanroom, on the north facing side (left side after entering). The official MIT room number is 39-514. The nearest phone is x3-1793 in the hallway.

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Process	Lab	Tool	Process Category	Subcategory	Description	Color Code
+	EML	asher-EML	Photo	Clean	Oxygen Plasma	EML
+	EML	SputtererAJA	Deposition	Sputter	Sputter deposition tool	EML
+	ICL	TMAH-KOHhood	Wet	Acids	Silicon bulk wet etching	Red &Green