This room is on the 4th floor of building 39, but not inside the regular TRL cleanroom area. Instead, it is accessed from the 4th floor hallway, at the exit towards building 38, and towards NSL. It is the first door on the right, the "Heidelberg room". The official MIT room number is 39-430A. There is a phone (x2-2880) inside the room.

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Process	Lab	Tool	Process Category	Subcategory	Description	Color Code
+	TRL	Balzer-Elionix	Deposition	Sputter	SEM or EBL sample preparation	Red
+	TRL	Heidelberg	Photo	Expose	Laser direct-write exposure for wafers and masks	Red &Green
+	TRL	PMMAspinner	Photo	Coat	Manual coater for PMMA and other photoresists	Red &Green