UV exposure of photoresist through mask

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Process	Lab	Tool	Process Category	Subcategory	Description	Color Code
+	EBL	Elionix	Photo	Expose	Electron beam lithography system	Red &Green
+	EML	MA-4	Photo	Expose	Contact Lithography Mask Aligner	EML
+	ICL	i-stepper	Photo	Expose	i-line stepper	Red &Green
+	TRL	EV1	Photo	Expose	Contact mask aligner	Red &Green
+	TRL	EV-LC	Photo	Expose	Contact mask aligner	Red &Green
+	TRL	Heidelberg	Photo	Expose	Laser direct-write exposure for wafers and masks	Red &Green
+	TRL	MA-6	Photo	Expose	Contact mask aligner	Red &Green
+	TRL	MLA-150	Photo	Expose	Direct-write lithography for wafers and larger pieces	Red &Green
+	TRL	OAI-Flood	Photo	Expose	Flood exposure for image reversal resists	Red &Green
+	TRL	Resonetics	Photo	Expose	Laser ablation system	Red