This room is the 1st equipment bay inside the ICL cleanroom, on the south facing side (right side after entering). The official MIT room number is 39-253. The nearest phone is x3-0978 located in the hallway between bay 1 and 2.

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Process	Lab	Tool	Process Category	Subcategory	Description	Color Code
+	ICL	4-pt-probe	Metrology	Electrical	Sheet resistance measurement of semiconductors	Red
+	ICL	ALD-Oxford	Deposition	CVD, PECVD	Atomic Layer Deposition	Green
+	ICL	cv	Metrology	Electrical	Electrical characterization of dielectrics	Green
+	ICL	P10	Metrology	Profile	Stylus profilerometer	Green
+	ICL	UV1280	Metrology	Thickness	Thin film characterization	Green
+	ICL	wykoICL	Metrology	Profile	Optical profiling system	Green