This room is on the 4th floor of building 39, inside the TRL cleanroom area. This is the second door on the right in the TRL cleanroom hallway, in the "photo area". The official MIT room number is 39-498. The nearest phone is x3-1728 located inside the room, hidden behind the MLA-150.

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Process	Lab	Tool	Process Category	Subcategory	Description	Color Code
+	TRL	dektak-XT	Metrology	Profile	Stylus Profilerometer	Red
+	TRL	hotplate1	Photo	Bake	Hotplate for lithography	Red &Green
+	TRL	hotplate2	Photo	Bake	Hotplate for lithography	Red &Green
+	TRL	hotplate300	Photo	Bake	Hotplate for lithography	Red &Green
+	TRL	MLA-150	Photo	Expose	Direct-write lithography for wafers and larger pieces	Red &Green
+	TRL	PZTcoater	Deposition	Spin-Coat	Coater to apply PZT films	Red
+	TRL	PZTfurnace	Deposition	Bake	Bake oven for PZT coated wafers	Red
+	TRL	SU8oven	Photo	Bake	Oven to dry foil from SU8 coater	Purple
+	TRL	SU8spinner	Photo	Coat	Manual spin-coater for SU8 resists	Purple
+	TRL	UVozone-Au	Etch	Clean	Cleans residual organics	Red
+	TRL	varTemp	Photo	Bake	Bake oven for variable temperature	Red