Equipment
| Lab and Coral Name | TRL / dek-NoAu |
| Model | Sloan Dektak |
| Specialist | Bernard Alamariu (David Terry) |
| Physical Location | 4F Main-North |
Classification
| Process Category | Metrology |
| Subcategory | Profile |
| Material Keywords | None |
| Sample Size | 6" Wafers, 4" Wafers, 7" Photo Plates, 5" Photo Plates, Pieces |
| Alternative | ICL / P10 |
| Keywords | single wafer, manual load, top side of sample, manual operation, alignment |
Description
The dek-NoAu is a stylus (contact) profilometer that is used to measure height differences (steps) on samples (No Au is allowed). This system operates by the stylus physically making contact with the sample surface and moving the stylus to measure changes in surface height.
| Best for | For measuring the step height for PR, metals and dielectrics. |
| Limitations | Depth monitoring in small openings (~ 100nm wide) is challenging. |
| Characteristics/FOM | Stylus moves over the surface to map the surface topography. |
| Caution with | Sample surface should be hard enough to avoid any deposits over the tip (e.g if PR is not sufficiently bakes) |
| Machine Charges | 2/hour |
Documents
Process Matrix Details
Permitted
Not Allowed
Ever been in EMLSamples from EML are never permitted to return to ICL or TRL
For more details or help, please consult PTC matrix, email ptc@mtl.mit.edu, or ask the research specialist (Bernard Alamariu)