Bernard Alamariu
Research Engineer, Diffusion and Device Characterization
39-213 - (617)253-8811 - bernard@mtl.mit.edu

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Process	Lab	Tool	Process Category	Subcategory	Description	Color Code
+	ICL	4-pt-probe	Metrology	Electrical	Sheet resistance measurement of semiconductors	Red
+	ICL	5A-GateOx	Diffusion	Oxidation	Diffusion tube for gate oxide growth	Green
+	ICL	5B-Anneal	Diffusion	Bake	Annealing tube	Green
+	ICL	5C-FieldOx	Diffusion	Oxidation	Diffusion tube for wet oxide growth of thicker films	Green
+	ICL	5D-ThickOx	Diffusion	Oxidation	Diffusion tube for wet oxide growth of thicker films	Green
+	ICL	6A-nPoly	Diffusion	CVD	Polysilicon deposition tube for n-type poly Si	Green
+	ICL	6B-Poly	Diffusion	CVD	Polysilicon deposition tube for p-type poly Si	Green
+	ICL	6C-LTO	Diffusion	CVD	Low temperature CVD oxide deposition	Green
+	ICL	6D-Nitride	Diffusion	CVD	Deposition of stoichiometric silicon nitride	Green
+	ICL	cv	Metrology	Electrical	Electrical characterization of dielectrics	Green
+	ICL	P10	Metrology	Profile	Stylus profilerometer	Green
+	ICL	rca-ICL	Diffusion	Clean	Wafer cleaning before diffusion tubes	Green
+	ICL	RTA2	Diffusion	Bake	Rapid Thermal Annealing	Green
+	ICL	RTA-pieces	Diffusion	Bake	Rapid Thermal Annealing	Red
+	ICL	RTP	Diffusion	Bake	Rapid Thermal Annealing	Green
+	ICL	RTP-Si	Diffusion	Bake	Rapid Thermal Annealing	Green
+	ICL	SM-300	Metrology	Thickness	Thickness measurement for CMP processing	Red &Green
+	ICL	UV1280	Metrology	Thickness	Thin film characterization	Green
+	ICL	wykoICL	Metrology	Profile	Optical profiling system	Green
+	TRL	A1-GateOx	Diffusion	Oxidation	Thermal Oxidation for Green Silicon Wafers	Green
+	TRL	A2-WetOxBond	Diffusion	Oxidation	Thermal Oxidation and other thermal process for GREEN Si wafers	Green
+	TRL	A3-Sinter	Diffusion	Bake	Sintering for GREEN Si wafers	Green
+	TRL	A4-III-Vanneal	Diffusion	Bake	Annealing for GREEN III-V samples	Red
+	TRL	B1-Au	Diffusion	Oxidation	Gold compatible anneal tube	Red
+	TRL	B2-Ox-alloy-Poly	Diffusion	Oxidation	Thermal Oxidation and LPCVD Polysilicon for RED wafers	Green
+	TRL	B3-DryOx	Diffusion	Oxidation	Thermal Oxidation	Green
+	TRL	B4-Poly	Diffusion	CVD	LPCVD polysilicon for Green wafers	Green
+	TRL	dek-NoAu	Metrology	Profile	Stylus Profilerometer	Green
+	TRL	Filmetrics-TRL	Metrology	Thickness	Thin film thickness measurement	Red &Green
+	TRL	Hall-probe	Metrology	Electrical	Carrier measurement	Red
+	TRL	IV-probe	Metrology	Electrical	Probe station with curve tracer for IV measurement	Red
+	TRL	rca-TRL	Diffusion	Clean	Wafer cleaning before diffusion tubes	Green
+	TRL	RTA-HiT	Diffusion	Bake	Rapid Thermal Annealing	Red
+	TRL	WYKO	Metrology	Profile	Optical profiling system	Red &Green