Each tool at MTL has a primary specialist assigned to it. Please contact the appropriate specialist to receive
training on the tool, or for assistance with optimizing the tool in your process. Additionally, each tool has a
secondary specialist assigned as a backup, as indicated on the tool's page.
Name | Tool List |
Bernard Alamariu
| 4-pt-probe,5A-GateOx,5B-Anneal,5C-FieldOx,5D-ThickOx,6A-nPoly,6B-Poly,6C-LTO,6D-Nitride,cv,P10,rca-ICL,RTA2,RTA-pieces,RTP,RTP-Si,SM-300,UV1280,wykoICL,A1-GateOx,A2-WetOxBond,A3-Sinter,A4-III-Vanneal,B1-Au,B2-Ox-alloy-Poly,B3-DryOx,B4-Poly,dek-NoAu,Filmetrics-TRL,Hall-probe,IV-probe,rca-TRL,RTA-HiT,WYKO,
|
Robert Bicchieri
| LAM490B,LAM590-ICL,Oxford-100_PECVD,Oxford-100_Etch,VTR,CCNT,LAM590-TRL,plasmaquest,XeF2,
|
Daniel A. Adams
|
|
Donal Jamieson
| ALD,ALD-Oxford,sts1,sts2,sts-CVD,sts-Pegasus,
|
David Terry
| acid-hood,asherMatrix-TRL,asher-TRL,coater,dektak-XT,eBeamAu,ellipsometer-TRL,EV1,EV-LC,Greenflo,HMDS-TRL,hotplate1,hotplate2,hotplate300,MA-6,nanospec,OAI-Flood,photo-wet-Au,photo-wet-l,photo-wet-r,postbake,prebakeovn,SolventHood-TRL,UVozone-Au,varTemp,
|
Dennis Ward
| Balzer-Elionix,develop-Brewer,EV501,EV620,FLX,Heidelberg,MLA-150,parylene,PMMAspinner,PZTcoater,PZTfurnace,Resonetics,SU8oven,SU8spinner,TBM-8,
|
Eric Lim
| AFM,AME5000,rainbow,AJA-TRL,SAMCO,
|
Gary Riggott
| epi-Centura,
|
Kurt Broderick
| acid-hood-EML,ALD-EML,anneal-furnace,asher-EML,BalzerSputterer,Box-Furnace,coater-EML,dektak-EML,eBeam-AJA,filmetrics,hotpress,MA-4,OxidationTube,parametric-tester,photo-hood-EML,plasmatherm,RTA-EML,semNeo,SolventHood-EML,SputtererAJA,vac-oven,TMAH-KOHhood,
|
Kristofor Payer
| Procedures-Cleaning,Procedures-Deposition,Procedures-Etching,Procedures-Lithography,Procedures-Metrology,OutsideLab,CNS,NSL,SNL,
|
Mark Mondol
| Elionix,
|
Paul Tierney
| asher-ICL,pTrack,i-stepper,nitrEtch-HotPhos,oxEtch-BOE,premetal-Piranha,semZeiss,
|
Paudely Zamora
| concept1,DCVD,eBeam-EVO,endura,eBeamFP,
|
Scott Poesse
| 2Dtransfer-platingHood,
|
Timothy Turner
| diesaw,goldwire,AutoBonder,BallBonder,WedgeBonder,X-rayInspection,
|
Vicky Diadiuk
| Procedures-General,
|
Ryan O'Keefe
| diesaw-3240,GnP,DieBonder,PlasmaCleaner,ReflowOven,QuickVisionMicroscope,
|