Paudely Zamora
Research Specialist, Vacuum Deposition
39-229 - (617)258-8864 - zamora@mtl.mit.edu

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Process	Lab	Tool	Process Category	Subcategory	Description	Color Code
+	ICL	concept1	Deposition	PECVD	PECVD deposition of oxides, nitrides, and TEOS	Green
+	ICL	DCVD	Deposition	PECVD	PECVD deposition of oxides, nitrides, and a-Si	Green
+	ICL	eBeam-EVO	Deposition	Evaporate	Metal evaporator of CMOS compatible metals	Green
+	ICL	endura	Deposition	Sputter	Metal sputter deposition	Green
+	TRL	eBeamFP	Deposition	Evaporate	Fast pumping metal evaporator	Red