Eric Lim
Research Engineer, Vacuum Etching / Equipment Maintenance
39-215 - (617)253-6897 - eslim@mtl.mit.edu

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Process	Lab	Tool	Process Category	Subcategory	Description	Color Code
+	ICL	AFM	Metrology	Profile	Atomic Force Microscope for Surface Analysis	Red &Green
+	ICL	AME5000	Etch	RIE	RIE etcher for frontend silicon processes	Green
+	ICL	rainbow	Etch	RIE	Chlorine based plasma etcher for metals	Green
+	TRL	AJA-TRL	Deposition	Sputter	Sputter deposition tool	Red
+	TRL	SAMCO	Etch	RIE	Chlorine based plasma etcher for III-V materials	Red