Equipment
| Lab and Coral Name | EML / semNeo |
| Model | Joel/Nikon Neoscope JCM-5000 |
| Specialist | Kurt Broderick (Timothy Turner, Gary Riggott) |
| Physical Location | 5F Hallway |
Classification
| Process Category | Metrology |
| Subcategory | SEM |
| Material Keywords | None |
| Sample Size | Pieces |
| Alternative | ICL / semZeiss |
| Keywords | single wafer, manual load, top side of sample, vacuum, manual operation, alignment |
Description
The semNeo is a bench-top SEM for samples up to 7 cm in size, with up to 0.2 um resolution. The lack of vibration isolation makes it marginally useful, mainly only for in-process inspection, but not for high-quality imaging.
| Best for | Simple and quick verification during processing |
| Limitations | This is a relatively low quality SEM that may not result in good images |
| Characteristics/FOM | 5, 10 and 15 kV |
| Caution with | |
| Machine Charges | 9/hour |
Documents
Process Matrix Details
PTC Matrix does not apply for EML
Ever been in EMLSamples from EML are never permitted to return to ICL or TRL