This room is the 2nd equipment bay inside the ICL cleanroom, on the north facing side (left side after entering). The official MIT room number is 39-291. The nearest phone is x3-0978 located in the hallway between bay 1 and 2.

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Process	Lab	Tool	Process Category	Subcategory	Description	Color Code
+	ICL	AFM	Metrology	Profile	Atomic Force Microscope for Surface Analysis	Red &Green
+	ICL	LAM490B	Etch	RIE	Chlorine based plasma etching of silicon	Green
+	ICL	LAM590-ICL	Etch	RIE	Fluorine based plasma etching of silicon oxide and nitrides	Green