This room is on the 4th floor of building 39, inside the TRL cleanroom area. This is the first door on the right in the TRL cleanroom hallway, in the "photo area". The official MIT room number is 39-498. The nearest phone is x3-0503 located outside the room in the hallway.

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Process	Lab	Tool	Process Category	Subcategory	Description	Color Code
+	TRL	coater	Photo	Coat	Manual spin-coater for photoresists	Red &Green
+	TRL	develop-Brewer	Photo	Coat	Resist develop and postbake	Red &Green
+	TRL	EV1	Photo	Expose	Contact mask aligner	Red &Green
+	TRL	EV-LC	Photo	Expose	Contact mask aligner	Red &Green
+	TRL	HMDS-TRL	Photo	Bake	HMDS oven	Red &Green
+	TRL	MA-6	Photo	Expose	Contact mask aligner	Red &Green
+	TRL	OAI-Flood	Photo	Expose	Flood exposure for image reversal resists	Red &Green
+	TRL	postbake	Photo	Bake	Bake oven 120C	Red &Green
+	TRL	prebakeovn	Photo	Bake	Bake oven 90C	Red &Green
+	TRL	SolventHood-TRL	Wet	Solvents	Solvent fume hood	Red &Green