This room is the 4th equipment bay inside the ICL cleanroom, at the very end of the hallway, on the south facing side (right side after entering). The official MIT room number is 39-267. The nearest phone is x3-0479 located in the hallway between bay 3 and 4.

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Process	Lab	Tool	Process Category	Subcategory	Description	Color Code
+	ICL	DCVD	Deposition	PECVD	PECVD deposition of oxides, nitrides, and a-Si	Green
+	ICL	rca-ICL	Diffusion	Clean	Wafer cleaning before diffusion tubes	Green
+	ICL	RTA2	Diffusion	Bake	Rapid Thermal Annealing	Green
+	ICL	RTA-pieces	Diffusion	Bake	Rapid Thermal Annealing	Red
+	ICL	RTP	Diffusion	Bake	Rapid Thermal Annealing	Green
+	ICL	RTP-Si	Diffusion	Bake	Rapid Thermal Annealing	Green