This room is on the 4th floor of building 39, but not inside the regular TRL cleanroom area. Instead, it is accessed from the 4th floor hallway, at the exit towards building 38, and towards NSL. It is the second door on the right, the "eBeam-FP room". The official MIT room number is 39-428A. There is a phone (x4-3042) inside the room.

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Process	Lab	Tool	Process Category	Subcategory	Description	Color Code
+	TRL	CCNT	Deposition	PECVD	Carbon nanotube growth	Red
+	TRL	eBeamFP	Deposition	Evaporate	Fast pumping metal evaporator	Red