This room is the 3rd equipment bay inside the ICL cleanroom, on the south facing side (right side after entering). The official MIT room number is 39-261. The nearest phone is x3-0479 located in the hallway between bay 3 and 4.

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Process	Lab	Tool	Process Category	Subcategory	Description	Color Code
+	ICL	asher-ICL	Photo	Clean	Single wafer oxygen plasma for photoresist removal	Green
+	ICL	pTrack	Photo	Coat	Automated coater and developer track	Green
+	ICL	nitrEtch-HotPhos	Wet	Acids	Hot phosphoric nitride etch bath	Green
+	ICL	oxEtch-BOE	Wet	Acids	Silicon dioxide etch bath	Green