This room is part of the 1st equipment bay inside the ICL cleanroom, on the north facing side (left side after entering). It is directly connected to the 1st bay through a passage. The official MIT room number is 39-204A. The nearest phone is x3-0978 located in the hallway between bay 1 and 2.

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Process	Lab	Tool	Process Category	Subcategory	Description	Color Code
+	ICL	Oxford-100_PECVD	Deposition, Etch	PECVD	Dual chamber PECVD and plasma etch tool	Red
+	ICL	Oxford-100_Etch	Deposition, Etch	RIE	Dual chamber PECVD and plasma etch tool	Red