This room is the 2nd equipment bay inside the ICL cleanroom, on the south facing side (right side after entering). The official MIT room number is 39-257. The nearest phone is x3-0976 located in the hallway between bay 1 and 2.

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Process	Lab	Tool	Process Category	Subcategory	Description	Color Code
+	ICL	AME5000	Etch	RIE	RIE etcher for frontend silicon processes	Green
+	ICL	eBeam-EVO	Deposition	Evaporate	Metal evaporator of CMOS compatible metals	Green
+	ICL	premetal-Piranha	Wet	Acids	Piranha resist removal and cleaning station	Green