This room is the 3rd equipment bay inside the ICL cleanroom, on the north facing side (left side after entering). The official MIT room number is 39-287. The nearest phone is x3-0479 located in the hallway between bay 3 and 4.

---

Process	Lab	Tool	Process Category	Subcategory	Description	Color Code
+	ICL	i-stepper	Photo	Expose	i-line stepper	Red &Green
+	ICL	semZeiss	Metrology	SEM	Scanning Electron Microscope	Red &Green