The general keywords relate to how a tool is operated, and how it handles your samples. So you will see whether it has a
cassette loader, requires manual operation, but also whether it is spinning your sample (which may not be good for fragile MEMS wafers)
or whether it exposes your sample to elevated temperatures (e.g. the PECVD tools). These keywords can often be used to see which
tools are not good choices for a certain requirement (e.g. if you have 6" wafers without a flat, which tools are not good choices).
| Attribute | Description | Tool List |
| alignment
| Alignment Needed
| Elionix,dektak-EML,filmetrics,hotpress,MA-4,parametric-tester,semNeo,4-pt-probe,AFM,cv,diesaw,diesaw-3240,goldwire,i-stepper,P10,semZeiss,UV1280,dek-NoAu,dektak-XT,ellipsometer-TRL,EV1,EV501,EV620,EV-LC,Filmetrics-TRL,FLX,Hall-probe,Heidelberg,IV-probe,MA-6,MLA-150,nanospec,Resonetics,TBM-8,AutoBonder,DieBonder,QuickVisionMicroscope,
|
| anisotropic etch
| Anisotropic Etch
| AME5000,GnP,LAM490B,LAM590-ICL,Oxford-100_PECVD,Oxford-100_Etch,rainbow,TMAH-KOHhood,LAM590-TRL,plasmaquest,SAMCO,sts1,sts2,sts-Pegasus,
|
| both sides of sample
| Both sides are processed
| acid-hood-EML,asher-EML,hotpress,photo-hood-EML,SolventHood-EML,2Dtransfer-platingHood,5A-GateOx,5B-Anneal,5C-FieldOx,5D-ThickOx,6A-nPoly,6B-Poly,6C-LTO,6D-Nitride,nitrEtch-HotPhos,oxEtch-BOE,premetal-Piranha,rca-ICL,TMAH-KOHhood,VTR,A1-GateOx,A2-WetOxBond,A3-Sinter,A4-III-Vanneal,acid-hood,asher-TRL,B1-Au,B2-Ox-alloy-Poly,B3-DryOx,B4-Poly,FLX,Greenflo,HMDS-TRL,photo-wet-Au,photo-wet-l,photo-wet-r,postbake,prebakeovn,PZTfurnace,rca-TRL,SolventHood-TRL,varTemp,
|
| conformal dep
| Conformal Deposition
| ALD-EML,BalzerSputterer,plasmatherm,SputtererAJA,2Dtransfer-platingHood,5A-GateOx,5B-Anneal,5C-FieldOx,5D-ThickOx,6A-nPoly,6B-Poly,6C-LTO,6D-Nitride,ALD,ALD-Oxford,pTrack,concept1,DCVD,endura,epi-Centura,Oxford-100_PECVD,Oxford-100_Etch,VTR,A1-GateOx,A2-WetOxBond,A3-Sinter,A4-III-Vanneal,AJA-TRL,B1-Au,B2-Ox-alloy-Poly,B3-DryOx,B4-Poly,Balzer-Elionix,coater,HMDS-TRL,parylene,PMMAspinner,PZTcoater,sts-CVD,SU8spinner,
|
| directional dep
| Directional Deposition
| eBeam-AJA,eBeam-EVO,CCNT,eBeamAu,eBeamFP,
|
| isotropic etch
| Isotropic Etch
| acid-hood-EML,asher-EML,photo-hood-EML,plasmatherm,SolventHood-EML,asher-ICL,nitrEtch-HotPhos,oxEtch-BOE,premetal-Piranha,rca-ICL,TMAH-KOHhood,acid-hood,asherMatrix-TRL,asher-TRL,Greenflo,photo-wet-Au,photo-wet-l,photo-wet-r,PZTfurnace,rca-TRL,Resonetics,SolventHood-TRL,UVozone-Au,XeF2,
|
| load lock
| Load Lock
| Elionix,plasmatherm,SputtererAJA,ALD-Oxford,AME5000,pTrack,concept1,DCVD,endura,epi-Centura,i-stepper,LAM490B,LAM590-ICL,Oxford-100_PECVD,Oxford-100_Etch,rainbow,RTA2,RTA-pieces,RTP,RTP-Si,AJA-TRL,eBeamFP,LAM590-TRL,plasmaquest,SAMCO,sts1,sts2,sts-CVD,sts-Pegasus,
|
| manual load
| Manual Loading
| Elionix,acid-hood-EML,ALD-EML,anneal-furnace,Box-Furnace,coater-EML,dektak-EML,eBeam-AJA,filmetrics,hotpress,MA-4,OxidationTube,parametric-tester,photo-hood-EML,RTA-EML,semNeo,SolventHood-EML,SputtererAJA,vac-oven,4-pt-probe,5A-GateOx,5B-Anneal,5C-FieldOx,5D-ThickOx,6A-nPoly,6B-Poly,6C-LTO,6D-Nitride,AFM,ALD,cv,diesaw,diesaw-3240,GnP,goldwire,nitrEtch-HotPhos,oxEtch-BOE,P10,premetal-Piranha,rca-ICL,semZeiss,SM-300,TMAH-KOHhood,VTR,wykoICL,A1-GateOx,A2-WetOxBond,A3-Sinter,A4-III-Vanneal,acid-hood,AJA-TRL,asher-TRL,B1-Au,B2-Ox-alloy-Poly,B3-DryOx,B4-Poly,Balzer-Elionix,CCNT,coater,dek-NoAu,dektak-XT,develop-Brewer,eBeamAu,eBeamFP,ellipsometer-TRL,EV1,EV501,EV620,EV-LC,Filmetrics-TRL,FLX,Greenflo,Hall-probe,Heidelberg,HMDS-TRL,IV-probe,MA-6,MLA-150,nanospec,OAI-Flood,parylene,photo-wet-Au,photo-wet-l,photo-wet-r,PMMAspinner,postbake,prebakeovn,PZTcoater,PZTfurnace,rca-TRL,Resonetics,RTA-HiT,SolventHood-TRL,sts1,SU8spinner,TBM-8,UVozone-Au,WYKO,XeF2,AutoBonder,BallBonder,WedgeBonder,X-rayInspection,DieBonder,PlasmaCleaner,ReflowOven,QuickVisionMicroscope,
|
| manual operation
| Manual Operation
| Elionix,acid-hood-EML,ALD-EML,anneal-furnace,asher-EML,BalzerSputterer,Box-Furnace,coater-EML,dektak-EML,eBeam-AJA,filmetrics,hotpress,MA-4,OxidationTube,parametric-tester,photo-hood-EML,RTA-EML,semNeo,SolventHood-EML,SputtererAJA,vac-oven,2Dtransfer-platingHood,4-pt-probe,5A-GateOx,5B-Anneal,5C-FieldOx,5D-ThickOx,6A-nPoly,6B-Poly,6C-LTO,6D-Nitride,AFM,ALD,cv,diesaw,diesaw-3240,eBeam-EVO,GnP,goldwire,nitrEtch-HotPhos,oxEtch-BOE,P10,premetal-Piranha,rca-ICL,semZeiss,SM-300,TMAH-KOHhood,wykoICL,A1-GateOx,A2-WetOxBond,A3-Sinter,A4-III-Vanneal,acid-hood,AJA-TRL,asher-TRL,B1-Au,B2-Ox-alloy-Poly,B3-DryOx,B4-Poly,Balzer-Elionix,CCNT,coater,dek-NoAu,dektak-XT,eBeamAu,ellipsometer-TRL,EV1,EV501,EV620,EV-LC,Filmetrics-TRL,FLX,Greenflo,Hall-probe,Heidelberg,hotplate1,hotplate2,hotplate300,IV-probe,MA-6,MLA-150,nanospec,OAI-Flood,parylene,photo-wet-Au,photo-wet-l,photo-wet-r,plasmaquest,PMMAspinner,PZTcoater,PZTfurnace,rca-TRL,Resonetics,SolventHood-TRL,sts1,SU8spinner,TBM-8,UVozone-Au,varTemp,WYKO,XeF2,BallBonder,WedgeBonder,X-rayInspection,PlasmaCleaner,ReflowOven,
|
| multi wafer
| Multiple Wafers
| anneal-furnace,Box-Furnace,OxidationTube,5A-GateOx,5B-Anneal,5C-FieldOx,5D-ThickOx,6A-nPoly,6B-Poly,6C-LTO,6D-Nitride,AME5000,asher-ICL,pTrack,concept1,DCVD,eBeam-EVO,endura,epi-Centura,i-stepper,LAM490B,LAM590-ICL,nitrEtch-HotPhos,oxEtch-BOE,premetal-Piranha,rainbow,rca-ICL,RTP,RTP-Si,TMAH-KOHhood,UV1280,VTR,A1-GateOx,A2-WetOxBond,A3-Sinter,A4-III-Vanneal,acid-hood,asherMatrix-TRL,asher-TRL,B1-Au,B2-Ox-alloy-Poly,B3-DryOx,B4-Poly,eBeamAu,eBeamFP,Greenflo,HMDS-TRL,LAM590-TRL,postbake,prebakeovn,rca-TRL,sts-Pegasus,varTemp,
|
| multiple pieces
| Multiple Pieces
| Elionix,acid-hood-EML,ALD-EML,anneal-furnace,asher-EML,Box-Furnace,eBeam-AJA,OxidationTube,photo-hood-EML,RTA-EML,SolventHood-EML,SputtererAJA,5A-GateOx,5B-Anneal,5C-FieldOx,5D-ThickOx,6A-nPoly,6B-Poly,6C-LTO,6D-Nitride,ALD,ALD-Oxford,goldwire,Oxford-100_PECVD,Oxford-100_Etch,RTA2,RTA-pieces,semZeiss,TMAH-KOHhood,A1-GateOx,A2-WetOxBond,A3-Sinter,A4-III-Vanneal,acid-hood,asher-TRL,B1-Au,B2-Ox-alloy-Poly,B3-DryOx,B4-Poly,CCNT,eBeamAu,eBeamFP,Greenflo,HMDS-TRL,hotplate1,hotplate2,hotplate300,photo-wet-Au,photo-wet-l,photo-wet-r,plasmaquest,postbake,prebakeovn,PZTfurnace,RTA-HiT,SAMCO,SolventHood-TRL,sts-CVD,UVozone-Au,varTemp,XeF2,
|
| None
| Procedures
| Procedures-Cleaning,Procedures-Deposition,Procedures-Etching,Procedures-General,Procedures-Lithography,Procedures-Metrology,AutoBonder,BallBonder,WedgeBonder,X-rayInspection,DieBonder,PlasmaCleaner,ReflowOven,QuickVisionMicroscope,OutsideLab,CNS,NSL,SNL,
|
| plasma
| Plasma
| asher-EML,BalzerSputterer,plasmatherm,SputtererAJA,ALD-Oxford,AME5000,asher-ICL,concept1,DCVD,endura,epi-Centura,LAM490B,LAM590-ICL,Oxford-100_PECVD,Oxford-100_Etch,rainbow,VTR,AJA-TRL,asherMatrix-TRL,asher-TRL,Balzer-Elionix,CCNT,LAM590-TRL,plasmaquest,SAMCO,sts1,sts2,sts-CVD,sts-Pegasus,XeF2,PlasmaCleaner,
|
| requires flat
| Wafer-Flat Required
| DCVD,endura,epi-Centura,i-stepper,rainbow,RTP,RTP-Si,UV1280,FLX,sts-Pegasus,
|
| single wafer
| Single Wafers
| Elionix,acid-hood-EML,ALD-EML,asher-EML,coater-EML,dektak-EML,eBeam-AJA,filmetrics,hotpress,MA-4,parametric-tester,photo-hood-EML,plasmatherm,RTA-EML,semNeo,SolventHood-EML,SputtererAJA,2Dtransfer-platingHood,4-pt-probe,AFM,ALD,ALD-Oxford,cv,diesaw,diesaw-3240,GnP,Oxford-100_PECVD,Oxford-100_Etch,P10,RTA2,RTA-pieces,semZeiss,SM-300,wykoICL,AJA-TRL,CCNT,coater,dek-NoAu,dektak-XT,develop-Brewer,ellipsometer-TRL,EV1,EV501,EV620,EV-LC,Filmetrics-TRL,FLX,Hall-probe,Heidelberg,hotplate1,hotplate2,hotplate300,IV-probe,MA-6,MLA-150,nanospec,OAI-Flood,parylene,photo-wet-Au,photo-wet-l,photo-wet-r,plasmaquest,PMMAspinner,PZTcoater,PZTfurnace,Resonetics,RTA-HiT,SAMCO,SolventHood-TRL,sts1,sts2,sts-CVD,SU8spinner,TBM-8,UVozone-Au,WYKO,XeF2,
|
| spinning substrate
| Spinning Substrate
| coater-EML,pTrack,GnP,coater,develop-Brewer,PMMAspinner,PZTcoater,SU8spinner,
|
| temperature
| Elevated Temperatures
| acid-hood-EML,ALD-EML,anneal-furnace,Box-Furnace,hotpress,OxidationTube,plasmatherm,RTA-EML,vac-oven,2Dtransfer-platingHood,5A-GateOx,5B-Anneal,5C-FieldOx,5D-ThickOx,6A-nPoly,6B-Poly,6C-LTO,6D-Nitride,ALD,ALD-Oxford,asher-ICL,pTrack,concept1,DCVD,epi-Centura,goldwire,nitrEtch-HotPhos,Oxford-100_PECVD,Oxford-100_Etch,premetal-Piranha,rca-ICL,RTA2,RTA-pieces,RTP,RTP-Si,TMAH-KOHhood,VTR,A1-GateOx,A2-WetOxBond,A3-Sinter,A4-III-Vanneal,acid-hood,B1-Au,B2-Ox-alloy-Poly,B3-DryOx,B4-Poly,CCNT,EV501,FLX,Greenflo,HMDS-TRL,hotplate1,hotplate2,hotplate300,parylene,postbake,prebakeovn,PZTfurnace,rca-TRL,RTA-HiT,SAMCO,SolventHood-TRL,sts-CVD,sts-Pegasus,SU8oven,varTemp,AutoBonder,BallBonder,WedgeBonder,PlasmaCleaner,ReflowOven,
|
| top side of sample
| Top side is processed
| Elionix,ALD-EML,anneal-furnace,BalzerSputterer,Box-Furnace,coater-EML,dektak-EML,eBeam-AJA,filmetrics,MA-4,OxidationTube,plasmatherm,RTA-EML,semNeo,SputtererAJA,4-pt-probe,AFM,ALD,ALD-Oxford,AME5000,asher-ICL,pTrack,concept1,cv,DCVD,diesaw,diesaw-3240,eBeam-EVO,endura,epi-Centura,GnP,goldwire,i-stepper,LAM490B,LAM590-ICL,Oxford-100_PECVD,Oxford-100_Etch,P10,rainbow,RTA2,RTA-pieces,RTP,RTP-Si,semZeiss,SM-300,UV1280,wykoICL,AJA-TRL,asherMatrix-TRL,Balzer-Elionix,CCNT,coater,dek-NoAu,dektak-XT,develop-Brewer,eBeamAu,eBeamFP,ellipsometer-TRL,EV1,EV501,EV620,EV-LC,Filmetrics-TRL,Hall-probe,Heidelberg,hotplate1,hotplate2,hotplate300,IV-probe,LAM590-TRL,MA-6,MLA-150,nanospec,OAI-Flood,parylene,plasmaquest,PMMAspinner,PZTcoater,Resonetics,RTA-HiT,SAMCO,sts1,sts2,sts-CVD,sts-Pegasus,SU8spinner,TBM-8,UVozone-Au,WYKO,XeF2,
|
| vacuum
| Vacuum
| Elionix,ALD-EML,anneal-furnace,asher-EML,BalzerSputterer,Box-Furnace,eBeam-AJA,OxidationTube,plasmatherm,RTA-EML,semNeo,SputtererAJA,ALD,ALD-Oxford,AME5000,asher-ICL,concept1,DCVD,eBeam-EVO,endura,epi-Centura,LAM490B,LAM590-ICL,Oxford-100_PECVD,Oxford-100_Etch,rainbow,RTA2,RTA-pieces,RTP,RTP-Si,semZeiss,VTR,AJA-TRL,asherMatrix-TRL,asher-TRL,Balzer-Elionix,CCNT,eBeamAu,eBeamFP,HMDS-TRL,LAM590-TRL,parylene,plasmaquest,Resonetics,RTA-HiT,SAMCO,sts1,sts2,sts-CVD,sts-Pegasus,UVozone-Au,XeF2,
|