Machines by General Keyword: spinning substrate
Process | Lab | Tool | Process Category | Subcategory | Description | |
---|---|---|---|---|---|---|
EML | coater-EML | Photo | Coat | Photoresist Coater | ||
ICL | pTrack | Photo | Coat | Automated coater and developer track | ||
ICL | GnP | Wet | Other | Chemical Mechanical Polishing to planarize surfaces | ||
TRL | coater | Photo | Coat | Manual spin-coater for photoresists | ||
TRL | develop-Brewer | Photo | Coat | Resist develop and postbake | ||
TRL | PMMAspinner | Photo | Coat | Manual coater for PMMA and other photoresists | ||
TRL | PZTcoater | Deposition | Spin-Coat | Coater to apply PZT films | ||
TRL | SU8spinner | Photo | Coat | Manual spin-coater for SU8 resists |