Deposition is primarily conformal

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Process	Lab	Tool	Process Category	Subcategory	Description	Color Code
+	EML	ALD-EML	Deposition	CVD	Atomic Layer Deposition	EML
+	EML	BalzerSputterer	Deposition	Sputter	Thin sputter coating of samples	EML
+	EML	plasmatherm	Deposition, Etch	PECVD, RIE	Plasma Etch and Deposition	EML
+	EML	SputtererAJA	Deposition	Sputter	Sputter deposition tool	EML
+	TRL	2Dtransfer-platingHood	Wet	Acids	Electroplating wet bench and fume hood	Red
+	ICL	5A-GateOx	Diffusion	Oxidation	Diffusion tube for gate oxide growth	Green
+	ICL	5B-Anneal	Diffusion	Bake	Annealing tube	Green
+	ICL	5C-FieldOx	Diffusion	Oxidation	Diffusion tube for wet oxide growth of thicker films	Green
+	ICL	5D-ThickOx	Diffusion	Oxidation	Diffusion tube for wet oxide growth of thicker films	Green
+	ICL	6A-nPoly	Diffusion	CVD	Polysilicon deposition tube for n-type poly Si	Green
+	ICL	6B-Poly	Diffusion	CVD	Polysilicon deposition tube for p-type poly Si	Green
+	ICL	6C-LTO	Diffusion	CVD	Low temperature CVD oxide deposition	Green
+	ICL	6D-Nitride	Diffusion	CVD	Deposition of stoichiometric silicon nitride	Green
+	ICL	ALD	Deposition	CVD	Atomic Layer Deposition	Red
+	ICL	ALD-Oxford	Deposition	CVD, PECVD	Atomic Layer Deposition	Green
+	ICL	pTrack	Photo	Coat	Automated coater and developer track	Green
+	ICL	concept1	Deposition	PECVD	PECVD deposition of oxides, nitrides, and TEOS	Green
+	ICL	DCVD	Deposition	PECVD	PECVD deposition of oxides, nitrides, and a-Si	Green
+	ICL	endura	Deposition	Sputter	Metal sputter deposition	Green
+	ICL	epi-Centura	Deposition	CVD	Not open to public	Green
+	ICL	Oxford-100_PECVD	Deposition, Etch	PECVD	Dual chamber PECVD and plasma etch tool	Red
+	ICL	Oxford-100_Etch	Deposition, Etch	RIE	Dual chamber PECVD and plasma etch tool	Red
+	ICL	VTR	Diffusion	CVD	Low stress silicon nitride deposition	Green
+	TRL	A1-GateOx	Diffusion	Oxidation	Thermal Oxidation for Green Silicon Wafers	Green
+	TRL	A2-WetOxBond	Diffusion	Oxidation	Thermal Oxidation and other thermal process for GREEN Si wafers	Green
+	TRL	A3-Sinter	Diffusion	Bake	Sintering for GREEN Si wafers	Green
+	TRL	A4-III-Vanneal	Diffusion	Bake	Annealing for GREEN III-V samples	Red
+	TRL	AJA-TRL	Deposition	Sputter	Sputter deposition tool	Red
+	TRL	B1-Au	Diffusion	Oxidation	Gold compatible anneal tube	Red
+	TRL	B2-Ox-alloy-Poly	Diffusion	Oxidation	Thermal Oxidation and LPCVD Polysilicon for RED wafers	Green
+	TRL	B3-DryOx	Diffusion	Oxidation	Thermal Oxidation	Green
+	TRL	B4-Poly	Diffusion	CVD	LPCVD polysilicon for Green wafers	Green
+	TRL	Balzer-Elionix	Deposition	Sputter	SEM or EBL sample preparation	Red
+	TRL	coater	Photo	Coat	Manual spin-coater for photoresists	Red &Green
+	TRL	HMDS-TRL	Photo	Bake	HMDS oven	Red &Green
+	TRL	parylene	Deposition	CVD	Parylene depopsition	Red
+	TRL	PMMAspinner	Photo	Coat	Manual coater for PMMA and other photoresists	Red &Green
+	TRL	PZTcoater	Deposition	Spin-Coat	Coater to apply PZT films	Red
+	TRL	sts-CVD	Deposition	PECVD	PECVD deposition of oxides, nitrides, a-Si, SiC, and P-doped a-Si	Red
+	TRL	SU8spinner	Photo	Coat	Manual spin-coater for SU8 resists	Purple