In a single process step, many pieces can be processed, usually as much as you can fit onto a 6" disk

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Process	Lab	Tool	Process Category	Subcategory	Description	Color Code
+	EBL	Elionix	Photo	Expose	Electron beam lithography system	Red &Green
+	EML	acid-hood-EML	Wet	Solvents	General Purpose Acid Fume-Hood	EML
+	EML	ALD-EML	Deposition	CVD	Atomic Layer Deposition	EML
+	EML	anneal-furnace	Diffusion	Bake	Anneal Furnace	EML
+	EML	asher-EML	Photo	Clean	Oxygen Plasma	EML
+	EML	Box-Furnace	Diffusion	Bake	Anneal Furnace	EML
+	EML	eBeam-AJA	Deposition	Evaporate	Metal and dielectric evaporator	EML
+	EML	OxidationTube	Diffusion	Oxidation	Oxidation Furnace	EML
+	EML	photo-hood-EML	Wet	Solvents	Solvent Fume hood for lithography	EML
+	EML	RTA-EML	Diffusion	Bake	Rapid Thermal Annealing	EML
+	EML	SolventHood-EML	Wet	Solvents	Solvent Fume hood for lithography	EML
+	EML	SputtererAJA	Deposition	Sputter	Sputter deposition tool	EML
+	ICL	5A-GateOx	Diffusion	Oxidation	Diffusion tube for gate oxide growth	Green
+	ICL	5B-Anneal	Diffusion	Bake	Annealing tube	Green
+	ICL	5C-FieldOx	Diffusion	Oxidation	Diffusion tube for wet oxide growth of thicker films	Green
+	ICL	5D-ThickOx	Diffusion	Oxidation	Diffusion tube for wet oxide growth of thicker films	Green
+	ICL	6A-nPoly	Diffusion	CVD	Polysilicon deposition tube for n-type poly Si	Green
+	ICL	6B-Poly	Diffusion	CVD	Polysilicon deposition tube for p-type poly Si	Green
+	ICL	6C-LTO	Diffusion	CVD	Low temperature CVD oxide deposition	Green
+	ICL	6D-Nitride	Diffusion	CVD	Deposition of stoichiometric silicon nitride	Green
+	ICL	ALD	Deposition	CVD	Atomic Layer Deposition	Red
+	ICL	ALD-Oxford	Deposition	CVD, PECVD	Atomic Layer Deposition	Green
+	ICL	goldwire	Packaging	Physical	Gold ball bonder for device packaging	Red
+	ICL	Oxford-100_PECVD	Deposition, Etch	PECVD	Dual chamber PECVD and plasma etch tool	Red
+	ICL	Oxford-100_Etch	Deposition, Etch	RIE	Dual chamber PECVD and plasma etch tool	Red
+	ICL	RTA2	Diffusion	Bake	Rapid Thermal Annealing	Green
+	ICL	RTA-pieces	Diffusion	Bake	Rapid Thermal Annealing	Red
+	ICL	semZeiss	Metrology	SEM	Scanning Electron Microscope	Red &Green
+	ICL	TMAH-KOHhood	Wet	Acids	Silicon bulk wet etching	Red &Green
+	TRL	A1-GateOx	Diffusion	Oxidation	Thermal Oxidation for Green Silicon Wafers	Green
+	TRL	A2-WetOxBond	Diffusion	Oxidation	Thermal Oxidation and other thermal process for GREEN Si wafers	Green
+	TRL	A3-Sinter	Diffusion	Bake	Sintering for GREEN Si wafers	Green
+	TRL	A4-III-Vanneal	Diffusion	Bake	Annealing for GREEN III-V samples	Red
+	TRL	acid-hood	Wet	Acids	Acid processing station	Red &Green
+	TRL	asher-TRL	Photo	Clean	Barrel asher for resist removal	Red &Green
+	TRL	B1-Au	Diffusion	Oxidation	Gold compatible anneal tube	Red
+	TRL	B2-Ox-alloy-Poly	Diffusion	Oxidation	Thermal Oxidation and LPCVD Polysilicon for RED wafers	Green
+	TRL	B3-DryOx	Diffusion	Oxidation	Thermal Oxidation	Green
+	TRL	B4-Poly	Diffusion	CVD	LPCVD polysilicon for Green wafers	Green
+	TRL	CCNT	Deposition	PECVD	Carbon nanotube growth	Red
+	TRL	eBeamAu	Deposition	Evaporate	Metal evaporator	Red
+	TRL	eBeamFP	Deposition	Evaporate	Fast pumping metal evaporator	Red
+	TRL	Greenflo	Wet	Acids	Acid processing station	Red &Green
+	TRL	HMDS-TRL	Photo	Bake	HMDS oven	Red &Green
+	TRL	hotplate1	Photo	Bake	Hotplate for lithography	Red &Green
+	TRL	hotplate2	Photo	Bake	Hotplate for lithography	Red &Green
+	TRL	hotplate300	Photo	Bake	Hotplate for lithography	Red &Green
+	TRL	photo-wet-Au	Wet	Solvents	Solvent fume hood with sonicator	Red &Green
+	TRL	photo-wet-l	Wet	Solvents	Wetbench for photoresist development	Red &Green
+	TRL	photo-wet-r	Wet	Solvents	Wetbench for photoresist development	Red &Green
+	TRL	plasmaquest	Etch	RIE	Fluorine and Chlorine general purpose plasma deposition and etch tool	Red
+	TRL	postbake	Photo	Bake	Bake oven 120C	Red &Green
+	TRL	prebakeovn	Photo	Bake	Bake oven 90C	Red &Green
+	TRL	PZTfurnace	Deposition	Bake	Bake oven for PZT coated wafers	Red
+	TRL	RTA-HiT	Diffusion	Bake	Rapid Thermal Annealing	Red
+	TRL	SAMCO	Etch	RIE	Chlorine based plasma etcher for III-V materials	Red
+	TRL	SolventHood-TRL	Wet	Solvents	Solvent fume hood	Red &Green
+	TRL	sts-CVD	Deposition	PECVD	PECVD deposition of oxides, nitrides, a-Si, SiC, and P-doped a-Si	Red
+	TRL	UVozone-Au	Etch	Clean	Cleans residual organics	Red
+	TRL	varTemp	Photo	Bake	Bake oven for variable temperature	Red
+	TRL	XeF2	Etch	RIE	XeF2 isotropic etching of silicon	Red