Some tools require wafers to have a flat, and cannot process flat-free wafers

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Process	Lab	Tool	Process Category	Subcategory	Description	Color Code
+	ICL	DCVD	Deposition	PECVD	PECVD deposition of oxides, nitrides, and a-Si	Green
+	ICL	endura	Deposition	Sputter	Metal sputter deposition	Green
+	ICL	epi-Centura	Deposition	CVD	Not open to public	Green
+	ICL	i-stepper	Photo	Expose	i-line stepper	Red &Green
+	ICL	rainbow	Etch	RIE	Chlorine based plasma etcher for metals	Green
+	ICL	RTP	Diffusion	Bake	Rapid Thermal Annealing	Green
+	ICL	RTP-Si	Diffusion	Bake	Rapid Thermal Annealing	Green
+	ICL	UV1280	Metrology	Thickness	Thin film characterization	Green
+	TRL	FLX	Metrology	Profile	Thin film stress measurement	Red &Green
+	TRL	sts-Pegasus	Etch	DRIE	Deep reactive ion etcher for silicon	Red